Substrate processing system and mechanical arm device thereof

Abstract

The invention discloses a mechanical arm device which comprises a first rocking rod (21) and a second rocking rod (22), wherein when the first rocking rod (21) rotates around the first end, the second rocking rod (22) drives an arm body (5) connected with the second rocking rod to slide along a sliding rail (7); and the mechanical arm device also comprises an assisting part, and the assisting part selectively drives the arm body (5) to slide forwards or backwards along the sliding rail (7). Therefore, when the mechanical arm device is positioned at a dead point, the assisting part drives the arm body (5) to move forwards or backwards along the sliding rail (7) so as to change the included angle between the first rocking rod (21) and the second rocking rod (22), thus the mechanical arm device passes through the dead point smoothly, and the driving reliability of the mechanical arm device is improved. The invention also discloses a substrate processing system comprising the mechanical arm device.

Description

technical field [0001] The invention relates to the field of automatic transmission equipment, in particular to a mechanical arm device used in a substrate processing system. The present invention also relates to a substrate processing system comprising the above robotic arm device. Background technique [0002] With the rapid development of my country's economic construction, the market demand for substrates is increasing, which drives the rapid development of the substrate processing industry. [0003] At present, the interior of the process chamber for processing substrates generally has an electrostatic chuck, which is used to support the substrate to be processed, and its lower part is provided with a lifting device, which is inserted into the lifting device for supporting the substrate. thimble. When processing the substrate, the substrate is generally sent into the process chamber by a special robot arm, and the substrate is higher than the upper surface of the elec...

AI Technical Summary

Problems solved by technology

However, in the actual working process, the slide block 15 may lose the necessary inertia to pass through the dead point due to various reasons. At this time, the mechanical arm mechanism cannot pass through the dead point; The test speed of slider 15 is relatively slow, and the energy it has is not enough to drive the mechanism through the dead point position; therefore, in many cases, the mechanical arm mechanism may not be able to pass through the dead point position smoothly, and the transmission reliability of the mechanism is low

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