Multistation gradient film coating equipment

Abstract

The invention belongs to the field of vacuum coating equipment, in particular relating to a multistation gradient film coating equipment, which comprises a driving module, a base plate (8), a workpiece disc (7), a mask mechanism (10) and a balancing mechanism (11), wherein the workpiece disc (7) is arranged on the base plate (8), can rotate around the axis thereof, and has a constant gap with the base plate (8); the workpiece (7) is fixedly provided with a coating station; a coating hole is arranged on the position of the base plate (8) corresponding to the coating station; the mask mechanism (10) is fixedly arranged between the coating station and the coating hole; the balancing mechanism (11) is fixedly arranged on the base plate (8) at the lower part of the coating hole; and the working end of the driving module is fixedly connected with the workpiece disc (7). The coating equipment of the invention can realize steady and accurate rotation transformation for stations (chips to be coated), and improve the product quantity coated by single vacuumization, thus improving the production efficiency of the whole system.

Description

technical field [0001] The invention belongs to the field of vacuum coating equipment, and in particular relates to a multi-station gradient film coating equipment. Background technique [0002] The variable density film is a kind of energy splitting element, which can attenuate and adjust the optical signal. It has the advantages of simple structure, wide wavelength range and good neutrality. It is widely used in various optical instruments and optical experiments. [0003] In order to achieve a specific energy attenuation effect, the optical density of the variable density sheet changes with the position, that is, the thickness of the film layer changes with the position. Commonly used variable density tablets are classified according to the change of optical density with position, usually can be divided into six types: circular gradient density tablets, strip gradient density tablets, circular stepped density sheets, strip stepped density sheets, "bull's eye " Density Fl...

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Problems solved by technology

[0006] In order to achieve the above object, the present invention is achieved in this way: a multi-station gradient film coating equipment, which includes a drive module, a substrate, a workpiece disk, a mask mechanism and Uniform mechanism; the workpiece disk is located on the substrate; the workpiece disk can rotate around its axis, and the distance between it and the substrate is constant; a coating station is fixed on the workpiece disk; The position of the coating station is provided with a coating hole; a mask mechanism is fixed between the coating station and the coating hole to realize gradual film coating; a uniform mechanism is fixed on the substrate at the bottom of the coating hole , to solve the problem of uneven film deposition; the working end of the drive module is fixedly connected to the workpiece disk

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