Baffle plate mechanism of observing window

A technology of baffle mechanism and observation window, applied in ion implantation plating, metal material coating process, coating and other directions, can solve problems such as affecting observation effect, human safety or health threat, etc.

Inactive Publication Date: 2011-01-26
DONGGUAN ANWELL DIGITAL MASCH CO LTD
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, while the observation window provides convenience for observing the operation of the equipment inside the cavity, the observation window is also easily coated by evaporated materials and affects the observation effect. The strong light or radiated light emitted by the equipment inside the cavity may pose a threat to the safety or health of persons

Method used

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  • Baffle plate mechanism of observing window
  • Baffle plate mechanism of observing window
  • Baffle plate mechanism of observing window

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Embodiment Construction

[0025] figure 1 It is a schematic cross-sectional view of the first embodiment of the observation window baffle mechanism of the present invention. combine Figure 1 to Figure 3 , the observation window baffle mechanism 100 of the present invention is connected to the vacuum cavity 200 and is used to block the observation window 210 on the vacuum cavity 200 .

[0026] refer to Figure 4 , the observation window baffle mechanism 100 includes a baffle 110 , a rotating shaft 120 , a rotating handle 130 , a fixing base 140 , a collar 150 , a magnetic fluid 160 , a first bearing 170 and a second bearing 180 .

[0027] refer to Figure 5 The rotating shaft 120 includes a first rotating shaft 121 and a second rotating shaft 122 . In this embodiment, the diameter of the first rotating shaft 121 is greater than the diameter of the second rotating shaft 122 . A step 123 is formed between the first shaft 121 and the second shaft 122 . A flat key 124 is disposed on the first rotatin...

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Abstract

The invention discloses a baffle plate mechanism of an observing window, comprising a baffle plate, a rotating shaft, a rotating handle, a fixing seat, a lined ring, magnetofluid, a first bearing and a second bearing, wherein an input hole is arranged on a vacuum cavity; the fixing seat is perforatively provided with a driving hole; the fixing seat is arranged on the outer wall of the vacuum cavity; the driving hole faces against the input hole; the front end of the rotating shaft enters into the vacuum cavity after sequentially and pivotally passing through the driving hole and the input hole and is fixedly connected with the baffle plate; the fixing seat is provided with a sealed installing groove along the radial direction of the driving hole; the lined ring, the first bearing, the magnetofluid and the second bearing are sequentially sleeved on the rotating shaft and accommodated into the sealed installing groove in a seal mode; the rotating handle is fixed at the rear end of the rotating shaft, and the rotating handle rotates by rotating the rotating handle; and the baffle plate is driven by rotating the rotating shaft to hide or expose the observing window. The baffle plate mechanism of the observing window is provided with the baffle plate, and the observing window of the vacuum cavity can be hidden by rotating the baffle plate.

Description

technical field [0001] The invention relates to the field of vacuum chambers for providing a vacuum environment, in particular to an observation window baffle mechanism that can block or open the observation window of the vacuum chamber through rotation. Background technique [0002] Organic light emitting displays have been regarded as a new generation of flat panel displays following the currently dominant liquid crystal displays or plasma displays due to simple device structures and simple manufacturing processes and good image quality. The production system for manufacturing small-molecule organic light-emitting displays is generally composed of evaporation systems and packaging systems, especially the thermal evaporation system for multilayer films is an important and key part. The thermal evaporation system includes a vacuum chamber, and the thermal evaporation process is completed in the vacuum chamber. The vacuum chamber is usually equipped with an observation windo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/52
Inventor 杨明生王伟郭远伦刘惠森范继良王勇王曼媛
Owner DONGGUAN ANWELL DIGITAL MASCH CO LTD
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