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Turbo molecular pump

A turbomolecular pump and stator technology, which can be used in pumps, pump components, axial flow pumps, etc., to solve problems such as reduced efficiency of turbomolecular pumps

Inactive Publication Date: 2011-01-19
OERLIKON LEYBOLD VACUUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to this backflow, the efficiency of the turbomolecular pump is significantly reduced

Method used

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Examples

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Embodiment Construction

[0016] follow in figure 1 An embodiment of a turbomolecular pump according to the prior art is shown in , showing a drive shaft 10 ( figure 2 ) on the rotor 12. The rotor 12 has rotor vanes 16 extending radially with respect to the longitudinal axis 14 or the axis of rotation of the shaft 10 . Each rotor vane has a rotor blade 18 which is suitable so that in the gas to be conveyed parallel to the longitudinal axis, that is to say at figure 1 Downward in the direction of arrow 20 produces the main flow direction. The rotor 12 is arranged in a housing 22 , wherein the housing for accommodating the rotor has a cylindrical, optionally stepped, recess 24 .

[0017] Part of the rotor blade 16 is surrounded by a stator ring 26 . The stator ring 26 is arranged continuously in the longitudinal direction 14 and thus covers the inner side of the cylindrical groove 24 of the housing 22 . Arranged between adjacent stator rings 26 are stator disks 28 facing inwards in the direction of...

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Abstract

The invention relates to a turbo molecular pump, comprising a rotor (12) connected to a drive shaft (10). The rotor (12) has multiple rotor blades (16). The rotor (12) is surrounded by stator rings (26), wherein one stator ring (26) is provided for each rotor blade (16). In order to enable radial expansion of the rotor blade during operation, the stator rings (26) have annular grooves (32).

Description

technical field [0001] The invention relates to a turbomolecular pump. Background technique [0002] A turbomolecular pump has a rotor connected to a drive shaft with a plurality of rotor blades. Stationary stator disks are arranged between the individual rotor blades. Usually, the stator disk is not directly connected to the pump casing, but is supported by the stator ring. In this case, each rotor vane is provided with a stator ring, wherein the stator ring is placed over the rotor for assembly. A gap must be provided between the rotor blades or rotor blade tips and the stationary housing or stator ring. This play is necessary in order to prevent the rotor blades from contacting stationary parts, ie the housing or the stator ring, in all operating states. In this case, the width of the gap must be so large that thermal expansion of the rotor blades can occur in all operating states without contact with stationary parts. Furthermore, with regard to the width of the gap...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04
CPCF04D29/542F04D19/042
Inventor 海因里希·恩伦德尔
Owner OERLIKON LEYBOLD VACUUM
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