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Preparation method of MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode

A metal wire and micro-electrode technology, which is applied in the field of medical devices, can solve the problems of weak bonding between the coating and the wire, which is not conducive to long-term implantation in the body, and the edge shape is too sharp, so as to achieve high flexibility and not easy to fall off , less traumatic effect

Inactive Publication Date: 2012-09-19
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The electrodes prepared by this method have low integration of electrode points, and multiple electrode wires need to be implanted during multi-point stimulation. The implantation operation is cumbersome and the implantation results are unreliable.
Its coating does not bond well to the wire, and its edge shape is too sharp
It is not conducive to long-term implantation in the body and implantation in deep tissues of the human body

Method used

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  • Preparation method of MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode
  • Preparation method of MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode
  • Preparation method of MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode

Examples

Experimental program
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Effect test

Embodiment 1

[0018] Such as figure 1 Shown, the present embodiment is prepared through the following steps

[0019] The first step is to clean the platinum wire;

[0020] The cleaning refers to cleaning with ultrasonic vibration.

[0021] In the second step, an induction heating device is used to heat an area on the platinum wire to 150°C.

[0022] The area width on the wire is 100 μm.

[0023] The third step is to deposit a polymer with a thickness of 4-5 μm on the platinum wire as an insulating layer of the platinum wire electrode. An electrode spot with a width of 100 μm is exposed. After cooling, a wire biological microelectrode with one electrode point is obtained.

[0024] The number of electrode points obtained in this embodiment is 1, and the width of the electrode points is 100 μm.

[0025] The diameter of the metal wire in this embodiment is 100 μm, and the metal is platinum; the polymer insulating layer is parylene.

Embodiment 2

[0027] Such as figure 2 Shown, the present embodiment is prepared through the following steps

[0028] The first step is to clean the platinum wire;

[0029] The cleaning refers to cleaning with ultrasonic vibration.

[0030] In the second step, the two regions on the platinum wire are heated to 250° C. by means of a micro-resistance wire heating device. Both regions on the wire have a width of 100 μm.

[0031] The third step is to deposit a polymer with a thickness of 4-5 μm on the platinum wire as an insulating layer of the platinum wire electrode. Two electrode spots with a width of 100 μm are exposed. After cooling, a metal wire biological microelectrode with two electrode points is obtained.

[0032] The number of electrode points obtained in this embodiment is 2, and the width of the electrode points is 100 μm.

[0033] The diameter of the metal wire in this embodiment is 100 μm, and the metal is platinum; the polymer insulating layer is parylene.

Embodiment 3

[0035] Such as image 3 Shown, the present embodiment is prepared through the following steps

[0036] The first step is to clean the platinum wire;

[0037] The cleaning refers to cleaning with ultrasonic vibration.

[0038] In the second step, the three regions on the platinum wire are heated to 500° C. by means of a micro-resistance wire heating device. The three regions on the wire are all 100 μm wide.

[0039] The third step is to deposit 8-9 μm polymer on the platinum wire as the insulating layer of the platinum wire electrode. Three electrode spots with a width of 100 μm are exposed. After cooling, a wire biological microelectrode with three electrode points is obtained.

[0040] The number of electrode points obtained in this embodiment is 3, and the width of the electrode points is 100 μm.

[0041] The diameter of the metal wire in this embodiment is 100 μm, and the metal is platinum; the polymer insulating layer is parylene.

[0042] The process of the above e...

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Abstract

The invention relates to an MEMS (Micro Electro Mechanical Systems) metal wire biological microelectrode and a preparation method thereof in the technical field of medical apparatuses and instruments. The method comprises the following steps of: (1) cleaning a platinum wire; (2) heating one or more areas on the platinum wire to 150-500 DEG C by utilizing heating equipment; and (3) depositing a layer of polymers on the heated platinum wire as an insulating layer of the metal wire electrode; and cooling to obtain a metal wire biological microelectrode with one or more electrode points.

Description

technical field [0001] The invention relates to a preparation method in the technical field of medical devices, in particular to a preparation method of a MEMS wire biological microelectrode. Background technique [0002] Functional neuromuscular electrical stimulation plays an important role in the treatment of neurological dysfunction and rehabilitation of nerve injury. With the development of microelectronics technology, micro-nano technology and biotechnology, nerve electrical stimulation has gradually developed from traditional transcutaneous electrical stimulation to implantable electrical stimulation. At present, implantable nerve electrical stimulation has made great progress in the treatment and control of neurological diseases, such as Parkinson's syndrome, retinal nerve disorders, auditory nerve disorders, paralysis, urinary incontinence and epilepsy. Electrical stimulation, as well as the treatment of Alzheimer's disease, pain relief and drug detoxification thro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C99/00A61N1/04
Inventor 刘景全朱正罕杨春生芮岳峰邱可可
Owner SHANGHAI JIAOTONG UNIV
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