Cardinal plate transporting equipment
A technology for substrates and equipment, applied in the field of substrate transportation equipment, can solve the problems such as the inability to form air layers, and achieve the effect of easy removal and suppression of dust pollution
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Embodiment approach 1
[0287] > Rotating Body Support Type
[0288] Hereinafter, another Embodiment 1 will be described with reference to the drawings.
[0289] Such as Figure 20 As shown, the substrate conveying device is provided with: a container conveying mechanism 111 for conveying the container 2 for the container; and a substrate relay unit 70 for transferring the substrate 1 relative to the container 2 conveyed by the container conveying mechanism 111 .
[0290] Furthermore, the substrate relay unit 70 is configured to take out the substrate 1 from the storage container 2 conveyed by the container conveyance mechanism 111 and store the substrate 1 in the storage container 2, and is configured to transfer the substrate 1 from the storage container 2. 1 and storage of the substrate 1 in the storage container 2.
[0291] [storage container]
[0292] Such as Figure 20 and Figure 21 As shown, the storage container 2 is configured to include: a container body 41 formed in a cylindrical sha...
Embodiment approach 2
[0348] > Plate-shaped body support type
[0349] Hereinafter, another embodiment 2 will be described with reference to the drawings.
[0350] In addition, another embodiment 2 has the same structure as another embodiment 1 except that the structure of the supported portion 119 is different, so the same reference numerals are assigned to the same components as another embodiment 1, and explanations are omitted. Another configuration of Embodiment 1.
[0351] Such as Figure 27 As shown, on the lid member 42 , supported portions 119 are provided in a state in which they protrude from the lid body 116 outward in the width direction and the container body side on both sides in the width direction of the upper end portion of the lid body 116 .
[0352] The supported portion 119 is formed of a plate-shaped body 126 whose lower surface is formed as a horizontal flat surface along the arrangement direction. In addition, the engaged portion 115 is supported in a state protruding dow...
Embodiment approach 3
[0355] "Another Embodiment 3" Pressure Cylinder Support Type
[0356] Hereinafter, another embodiment 3 will be described with reference to the drawings.
[0357] In addition, another embodiment 3 has the same configuration as another embodiment 1 except that the configurations of the engaging portion 114, the supported portion 119, and the cover detachment mechanism 122 are different, so regarding the same configuration as another embodiment 1, The description will be omitted by assigning the same reference numerals, and the configuration different from the first embodiment will be mainly described.
[0358] Such as Figure 28 As shown, the cover member 42 is provided with an engaged portion 115 that engages with the engaging portion 114 located at the upper end portion of one end of the container main body 41 from the obliquely upper side of the cover member side in the arrangement direction. are engaged and supported on the engaging portion 114. That is, the lid member 4...
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