Method and system for preparing high vacuum field modulation for organic small molecular orientation nano film
A nano-film and preparation system technology, applied in vacuum evaporation plating, ion implantation plating, semiconductor/solid-state device manufacturing, etc.
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[0020] The present invention will be further explained in conjunction with the drawings.
[0021] The preparation system of high-vacuum field-modulated organic small molecule oriented nano-films is shown in Figure 1. It includes a glass window 7 with a diameter of 10Cm and sealed with the cavity in the middle of one side of the high-vacuum evaporation chamber 1, outside the high-vacuum evaporation chamber , A polarizer 6 with adjustable direction is fixed next to the glass window, and a white light source 5 with adjustable light intensity is placed in front of the polarizer.
[0022] High vacuum field modulation organic small molecule orientation nano film preparation method one:
[0023] Deposit octahydroxyquinoline aluminum (Alq) on a clean ITO substrate 3 )A step of:
[0024] Step 1. Install Alq 3 Direct current is applied to the evaporation boat 3, and the evaporation rate is 0.1nm / s;
[0025] Step 2. During the evaporation, a white light is incident from the white light source 5 i...
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