Method and system for preparing high vacuum field modulation for organic small molecular orientation nano film

A nano-film and preparation system technology, applied in vacuum evaporation plating, ion implantation plating, semiconductor/solid-state device manufacturing, etc.

Inactive Publication Date: 2010-08-11
BEIJING JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The preparation of oriented nano-films of small organic molecules modulated by the field in the high vacuum evaporation process has not been reported by other research groups at home and abroad.

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  • Method and system for preparing high vacuum field modulation for organic small molecular orientation nano film
  • Method and system for preparing high vacuum field modulation for organic small molecular orientation nano film
  • Method and system for preparing high vacuum field modulation for organic small molecular orientation nano film

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Embodiment Construction

[0020] The present invention will be further explained in conjunction with the drawings.

[0021] The preparation system of high-vacuum field-modulated organic small molecule oriented nano-films is shown in Figure 1. It includes a glass window 7 with a diameter of 10Cm and sealed with the cavity in the middle of one side of the high-vacuum evaporation chamber 1, outside the high-vacuum evaporation chamber , A polarizer 6 with adjustable direction is fixed next to the glass window, and a white light source 5 with adjustable light intensity is placed in front of the polarizer.

[0022] High vacuum field modulation organic small molecule orientation nano film preparation method one:

[0023] Deposit octahydroxyquinoline aluminum (Alq) on a clean ITO substrate 3 )A step of:

[0024] Step 1. Install Alq 3 Direct current is applied to the evaporation boat 3, and the evaporation rate is 0.1nm / s;

[0025] Step 2. During the evaporation, a white light is incident from the white light source 5 i...

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Abstract

The invention discloses a method for preparing a high vacuum field modulation organic micromolecule oriented nano-film and a system thereof. The nano-film is applicable to all organic semiconductor devices. The method comprises the steps: an evaporation boat (3) filled with organic micromolecule materials is electrified with direct current, and the evaporation rate of the organic micromolecule materials is controlled within the range of 0.1nm / s-0.3nm / s; a beam of white light with the light intensity of 100-1000 candela is emitted into a vacuum cavity in an incident way, a beam of linearly polarized light having the light vector direction being parallel to evaporation particle flow is obtained through a polaroid sheet (6) arranged in front of a glass window (7), and the orientation of the single organic micromolecule is modulated by the polarized light; the organic micromolecule nano-film which is distributed in an oriented way is formed. The system is provided with the glass window which is sealed with the cavity and has the diameter of 10cm in the middle of one side of a high vacuum evaporation cavity (1); the polaroid sheet having the adjustable direction is fixed closely to theglass window, and a white light source (5) with adjustable light intensity is placed in front of the polaroid sheet.

Description

Technical field [0001] The invention relates to a field modulation method and system based on an oriented nanometer film of organic small molecules. The organic nanometer film can be applied to all organic semiconductor devices. Background technique [0002] In 2000, the American magazine "Science" listed the progress made in organic electronics as one of the top ten scientific and technological achievements in 2000, including major discoveries such as the draft of the human genome and cloning technology. In the same year, the Nobel Prize in Chemistry was awarded to Hegel, McDiamid, Hideki Shirakawa and others for their major breakthroughs in organic electronics and organic / polymer research. Therefore, people have reason to believe that with the in-depth research of organic electronics and the improvement of the preparation process of organic electronic devices, a new era—the era of organic electronics is bound to come. [0003] Organic electronic materials and their application i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/12H01L51/00
Inventor 张福俊徐征王永生赵谡玲卢丽芳
Owner BEIJING JIAOTONG UNIV
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