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Iris diaphragm used for shaping light beam and diaphragm regulating method

A diaphragm and variable technology, applied in optics, optical components, installation, etc., can solve problems such as the difficulty of adjusting the variable diaphragm, and achieve the effect of maximizing space utilization, compact structure size, and convenient adjustment

Active Publication Date: 2010-12-08
深圳清溢光电股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a variable aperture with compact structure, small volume, easy adjustment and precision, aiming at the defect of difficult adjustment of the above-mentioned variable aperture in the prior art.

Method used

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  • Iris diaphragm used for shaping light beam and diaphragm regulating method
  • Iris diaphragm used for shaping light beam and diaphragm regulating method
  • Iris diaphragm used for shaping light beam and diaphragm regulating method

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Embodiment Construction

[0042] like Figure 3-16 As shown, in one embodiment of the variable diaphragm of the present invention, it includes a base 1 and a plurality of adjustment mechanisms for adjusting the size of the diaphragm. The base 1 is in the shape of a square flat plate (other shapes are certainly possible), and a light-transmitting hole is provided in the middle to facilitate the passage of light beams. The adjustment mechanism is evenly distributed on the circumference of the light transmission hole, and the size, shape, position, etc. of the light transmission hole are adjusted by the adjustment mechanism to realize the adjustment of the aperture.

[0043] like image 3 As shown, there are four adjusting mechanisms, which are evenly distributed on the base 1 . Each adjustment mechanism includes a guide mechanism arranged on the base 1, a light-blocking diaphragm 2 mounted on the guide mechanism, and a driving element 5 for driving the light-blocking diaphragm 2 to move on the guide me...

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Abstract

The invention relates an iris diaphragm and a diaphragm regulating method thereof. The iris diaphragm comprises a base with a loophole and at least three groups of regulating mechanisms which are equably arranged on a circle of the loophole; each of the regulating mechanisms comprises a guiding device arranged on the base, light blocking diaphragm sheets which are correspondingly arranged on the guiding mechanism and a driving unit that drives the diaphragm sheets to move on the guiding mechanism; and a non-light tight diaphragm opposite to the loophole is formed by the diaphragm sheets in encirclement. The iris diaphragm can realize independent regulation of each diaphragm respectively by setting a plurality of diaphragm sheets, wherein each diaphragm sheet is independently driven by a driving unit to move along the guiding direction of the guiding mechanism, thereby leading each geometric side of the diaphragm to be controllable, facilitating the regulating of the shape, size and position of the diaphragm, and having the advantages of simple and accurate regulation.

Description

technical field [0001] The invention relates to a light transmission device, in particular to a variable aperture capable of adjusting the size and shape of the light transmission and a method for adjusting the aperture. Background technique [0002] In semiconductor devices, liquid crystal, plasma, organic EL and other display devices, photomask manufacturing and other precision (such as micron, submicron, deep submicron) laser micromachining fields, it is often necessary to shape the beam shape of the laser beam to Make the projected or imaged beam present a desired geometric shape (such as a circle or rectangle, etc.) of the light spot. The shaping mechanism for these spots is usually an aperture. [0003] In some occasions, since the processed objects (such as ITO glass lines) have different sizes and different process requirements, the size and edge position of the spot formed by the laser beam can be adjusted. Therefore, it is necessary to use a variable The diaphrag...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/00G02B7/00
Inventor 林琳
Owner 深圳清溢光电股份有限公司
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