Flexible vibratory micro-electromechanical device
a micro-electromechanical device, flexible technology, applied in the field of micro-electromechanical systems, can solve the problems of more susceptibility to signal noise and thicker proof mass
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0017] What is described are improved mechanisms and structures in a sensor element of an electronic sensor device that allows for the realignment of relative frequencies at various vibration modes. This allows the sensor device to use thicker movable proof masses, which improves yield in mass production applications and allows process tolerances to be relaxed. To this end, in one embodiment there is a sensor element for a sensor device comprising a substrate, a pair of proof masses, and a set of drive beams. The pair of proof masses is suspended above the substrate and is attached to the substrate at fixed anchor points. The set of drive beams is positioned between the proof masses and the anchor points. The drive beams have a longitudinal body portion that extends along a first direction and a flexible spring member that extends along a second direction. The second direction may be perpendicular to the first direction and the flexible spring members may be serpentine in shape, suc...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com