Optimized piezo driven micro spraying device and fabricating method
A technology of piezoelectric drive and processing method, which is applied in the field of medical equipment, can solve the problems of small flow rate of micro-spray, and achieve the effect of increasing flow rate, avoiding water film problem, and uniform distribution of droplet spraying
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[0029] According to the requirements of the application and previous relevant research results, the embodiment of the optimized piezoelectric-driven array micro-spray structure designed by the present invention is as follows image 3 shown. The device is mainly composed of an orifice membrane 13 , an elastic cavity membrane 9 and a piezoelectric sheet 10 . The orifice film 13 first uses the ICP process to etch the micro-nozzle array 12, and then uses the bulk silicon process to etch the groove structure on the silicon wafer, and makes the micro-nozzle become a through hole, and the diameter of the micro-nozzle is controlled at 3 Between ~30μm, the length is 30μm, and the number of nozzle holes is 4000. The elastic cavity membrane 9 is the remaining part after the circular grooves with a diameter of 10 mm, a depth of 100 μm and a depth of 200 μm are respectively etched on the upper and lower surfaces of the silicon wafer by the bulk silicon process, and the thickness is 100 μm...
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