Automatic supply and mixing system and method of chemical liquid medicine for semiconductor preparation

Abstract

The invention discloses an automatic supply and mixing system and method for chemical liquid medicine for semiconductor preparation, and the system comprises a liquid medicine barrel, a supply and mixing mechanism, a liquid change lifting mechanism, a flow detection assembly and an inclined force application mechanism, and the inclined force application mechanism is arranged on the side edge of the liquid change lifting mechanism; the pushing mechanism is used for pushing the liquid medicine barrel to rotate towards the feeding and mixing mechanism around the edge of the bottom surface of the pushing mechanism, so that the feeding and mixing mechanism pumps chemical liquid medicine at the bottom of the liquid medicine barrel in time; the control system is connected with the feeding and mixing mechanism, the liquid change lifting mechanism, the flow detection assembly and the inclined force application mechanism, the control system regulates and controls pumping work of the feeding and mixing mechanism according to the real-time measurement result of the flow detection assembly, and the control system calculates the residual liquid amount of the liquid medicine barrel according to the real-time measurement result of the flow detection assembly. And the control system sequentially regulates and controls the inclined force application mechanism and the liquid change lifting mechanism to work based on the calculated residual liquid amount. Inclined gathering of the liquid medicine is avoided, and the proportion precision of the chemical liquid medicine is guaranteed.

Description

technical field [0001] The invention relates to the technical field of semiconductor preparation, in particular to an automatic supply and mixing system and method for chemical liquid used in semiconductor preparation. Background technique [0002] Many kinds of liquid chemicals are used in the wet process steps of semiconductor manufacturing, and various chemical liquids are mixed in proportion to form various reagents to realize the etching or cleaning of semiconductor wafers. [0003] The semiconductor industry needs to use a lot of chemical solutions, most of which are strong acid, strong alkali or strong corrosive solutions. For safety and production requirements, a liquid supply system is often used to transport or mix the liquid medicine before transporting it. Especially when the medicinal liquid used is a mixed solution, it is necessary to extract various medicinal liquids from the medicinal liquid barrel or liquid storage barrel, etc., and send them to the mixed l...

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Problems solved by technology

[0005] The purpose of the present invention is to provide an automatic supply and mixing system and method of chemical liquid for semiconductor preparation, so as to solve the problem of the error in the mixing amount of the chemical liquid caused by air inhalation in the prior art, which makes the proportion of the chemical liquid inaccurate and affects the quality of the reagent. performance technical issues

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