High-power radio frequency power source output power linear control system and method

Abstract

The invention relates to a high-power radio frequency power source output power linear control system and method. The system comprises a radio frequency signal generation unit, a radio frequency power amplifier module group, a power synthesis unit, a control signal source, a signal processing unit and a power control unit. Each radio frequency power amplifier module of the radio frequency power amplifier module group is connected to the primary stage of a power synthesis transformer in the power synthesis unit. The power synthesis unit synthesizes and outputs the power of each radio frequency power amplifier module. The control signal source is a given analog voltage signal used for controlling output power. The power control unit controls the power output of the radio frequency power amplifier module group by cooperatively adjusting the number of power modules and the voltage of a power supply unit according to a digital signal obtained by the signal processing unit. According to the invention, linear control of the output power of a radio frequency power source by an analog signal is realized, linear superposition of the output power is ensured, the problem that the power regulation precision is reduced is fundamentally solved, and the power regulation precision under the condition of high power output is improved.

Description

technical field [0001] The invention is applied to the field of neutral beam injectors of radio frequency negative ion sources, and in particular relates to a linear control system and method for the output power of a high-power radio frequency power source. Background technique [0002] The radio frequency negative ion source neutral beam injector requires a high power radio frequency power source to provide radio frequency power for the inductively coupled drive coil to generate plasma. The RF power source used in this field needs to have the characteristics of high power output, high linearity, and high precision. In order to obtain sufficient RF power, the existing technology uses a power combining transformer to perform power superposition output on multiple RF power amplifier modules. The voltage superimposed on the secondary side of each radio frequency power amplifier module is fixed. Through research, it is found that such a design makes the output power and the nu...

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Problems solved by technology

[0005] In order to overcome the disadvantage that the power adjustment accuracy of existing radio frequency power sources tends to decline with the increase of radio frequency output power, the present invention proposes an output power linear control system and method, which can be used to achieve linear superposition of output power to obtain a higher High power adjustment accuracy, realizing the linear control of the output power of the high-power RF power source by the control signal

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