A Coating Rotation Mechanism with Automatic Oscillating Planetary Disk

The technology of a rotating mechanism and a planetary disk is applied in the field of coating rotating mechanism, which can solve the problems of affecting the quality of the coating layer, reducing the coating efficiency, and having impurities in the coating layer, so as to achieve the effect of ensuring the quality of the coating layer and improving the coating efficiency.

Active Publication Date: 2022-06-24
布勒莱宝光学设备(北京)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method has many disadvantages. First, the door needs to be opened to manually adjust the angle of the planetary disk between the two coatings. During this process, pollutants are easily introduced, resulting in impurities in the middle of the coating, which affects the quality of the coating. Increase the exhaust time once, resulting in a decrease in coating efficiency

Method used

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  • A Coating Rotation Mechanism with Automatic Oscillating Planetary Disk
  • A Coating Rotation Mechanism with Automatic Oscillating Planetary Disk
  • A Coating Rotation Mechanism with Automatic Oscillating Planetary Disk

Examples

Experimental program
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Effect test

Embodiment 1

[0015] This embodiment provides a coating rotation mechanism with an automatic swinging planetary disk, and the coating rotation mechanism is used to place a workpiece to be coated, such as a substrate, such as figure 1 As shown, it is installed in the vacuum chamber 1 and driven by a rotary drive device 2 such as a drive motor installed on the top of the vacuum chamber 1, under the action of the evaporation source 3, the uniform coating of the workpiece is realized. The vacuum chamber 1 , the rotary drive device 2 , and the evaporation source 3 are common components in the coating machine, and to avoid redundant description, the present invention omits their specific introduction.

[0016] like Figure 1 to Figure 3 As shown, the coating rotation mechanism provided by this embodiment with the automatic swinging planetary disk may include: a guide wheel 7 , a fixed wheel 8 and a revolving disk 6 that are coaxially arranged in sequence.

[0017] The guide wheel 7 is arranged a...

Embodiment 2

[0025] Figure 4 Another embodiment of the present invention provides a coating rotation mechanism with an automatic swinging planetary disk. like Figure 4 As shown, the structure of the coating rotation mechanism of this embodiment is basically the same as the structure of the coating rotation mechanism of the previous embodiment, the difference is that the automatic swing of the self-rotating plate is realized by the cam and the spring. In the following, in order to avoid redundant description, only the differences are introduced.

[0026]Specifically, in this embodiment, the guide wheel 7 is replaced with a cam 30, the guide track is the outer side of the cam 30, and the bearing 19 is in contact with the outer side and can roll along the outer side. A tension spring 31 may be arranged between the sliding member of the sliding structure and the front end of the guide rail, or a compression spring (not shown) may be arranged between the sliding member of the sliding struct...

Embodiment 3

[0029] Figure 5 Another embodiment of the present invention provides a coating rotation mechanism with an automatic swinging planetary disk. like Figure 5 As shown in the figure, the structure of the coating rotating mechanism of this embodiment is basically the same as that of the coating rotating mechanism of the previous embodiment, the difference is that the coating rotating mechanism is not provided with a guide wheel, and the swing transmission mechanism realizes the automatic rotation of the self-rotating disk 11 through the crank and the connecting rod. swing. In the following, in order to avoid redundant description, only the differences are introduced.

[0030] In this embodiment, the sliding structure 10 is connected with the first driven wheel 14 through the crank 41 and the connecting rod 42 . One end of the crank 41 is rotatably connected to the first driven wheel 14 through the fixing frame, the other end is rotatably connected to one end of the connecting ...

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Abstract

The invention provides a coating rotating mechanism with an automatic swing planetary disc, comprising: a fixed wheel, a revolving disc and a guide wheel; the fixed wheel is connected with a vacuum chamber; the revolving disc is arranged under the fixed wheel, and is provided with a plurality of self-rotating discs , each self-rotating disk is connected with the fixed wheel through the rotation transmission mechanism and connected with the guide wheel through the swing transmission mechanism. The structure of the guide rail is configured to drive the sliding structure to move back and forth along the guide rail when the revolving disk rotates, so that the swing arm swings. The invention can avoid opening the door to manually adjust the angle of the self-rotating disk, so that the coating process can be completed at one time, thereby ensuring the quality of the film layer and improving the coating efficiency.

Description

technical field [0001] The invention relates to the technical field of coating machines, in particular to a coating rotating mechanism with an automatic swinging planetary disc. Background technique [0002] With the vigorous development of electronic equipment, various types of chips have emerged. For some chips, some micro inner grooves will be provided, and these micro inner grooves also need to be uniformly coated in order to realize the function of the chip. If the direction of the substrate used relative to the evaporation source remains unchanged during the coating process, one surface of the inner groove cannot be coated with the film. At present, the commonly used method is to use a planetary disk that can manually adjust the angle. The coating is divided into two times. The first time is to manually adjust an angle coating. After the coating is completed, the device needs to open the door, and then manually adjust an angle coating. This method has many disadvanta...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50C23C14/24
CPCC23C14/505C23C14/24
Inventor 刘亮肖畅
Owner 布勒莱宝光学设备(北京)有限公司
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