Nanoimprint structure, its control method, nanoimprint device and patterning method

Abstract

The invention discloses a nano-imprint structure, its control method, a nano-imprint device, and a patterning method. By setting a bearing structure on a magnetic connecting rod, and setting a soft film plate as a ring-shaped soft film plate, the ring-shaped soft film plate The diaphragm is sleeved at the position where the magnetic connecting rod has a bearing structure. By controlling the bearing structure to rotate around the magnetic connecting rod, the embossed pattern of the ring-shaped soft diaphragm is driven to move in the second direction. By controlling the bearing structure on the magnetic connecting rod Slide to drive the embossed pattern of the ring-shaped soft film plate to move in the first direction, so as to set up a ring-shaped soft film plate, adjust the area where the embossed pattern is located, and complete the composition of the substrate, which not only solves the problem of multiple soft film plates The uniformity of the composition caused by the splicing of the film plates also greatly saves the production cost.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a nanoimprint structure, a control method thereof, a nanoimprint device and a patterning method. Background technique [0002] Using nanoimprint technology for patterning, because it can form nanoscale dimensions, it can make the display panel achieve high resolution, and it also has the advantages of simple process, ultra-low cost, and high productivity. It is widely used in LEDs, semiconductors, etc. The field of micro-nano manufacturing is considered to be one of the promising next-generation lithography technologies. [0003] In the existing nanoimprinting process, due to the limitation of the size of the hard template, the hard template can only be copied multiple times, and multiple soft templates can be copied, so that the position of the embossed pattern in each soft film plate is different. The different positions of the substrate are patterned by the board, so that th...

AI Technical Summary

Problems solved by technology

However, in the process of forming the soft template, each soft film board needs to copy the graphics on the hard template separately, and it cannot be guaranteed that the direction of the grating on the hard template copied each time is consistent, which will cause the final copied The quality of the soft template is not good. When patterning the substrate, it will lead to poor uniformity of the graphics on the substrate and affect the display quality.

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