A kind of cleaning equipment and its cleaning method before evaporation

A technology for cleaning equipment and vapor deposition, which is applied in the directions of cleaning methods using liquids, cleaning methods using tools, cleaning methods and utensils, etc., and can solve the problems of general cleaning effect of objects to be evaporated.

Active Publication Date: 2020-09-22
浙江环迪工贸有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the surface of the evaporated material needs to be cleaned before evaporation. The existing cleaning equipment has a general cleaning effect on the evaporated material and cannot effectively clean the evaporated material.

Method used

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  • A kind of cleaning equipment and its cleaning method before evaporation
  • A kind of cleaning equipment and its cleaning method before evaporation
  • A kind of cleaning equipment and its cleaning method before evaporation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as Figure 1-2As shown, a cleaning device used before evaporation includes a box body 1 and a box cover 2, the box body 1 is provided with a water tank 3, a power supply 4, a control device 5, a motor 6 and an electric cylinder 7, the Water tank 3, power supply 4, control device 5, motor 6 and electric cylinder 7 are all fixedly connected with box body 1, described motor 6 is provided with shaft coupling 8, and described shaft coupling 8 is connected with rotating shaft 9, so One end of the rotating shaft 9 is fixedly connected to the motor 6 through a coupling 8, and the first pneumatic finger 10 and the second pneumatic finger 11 for clamping the material to be evaporated are arranged in the box 1, and the motor 6 is located at On the left side of the first pneumatic finger 10, the first pneumatic finger 10 is bolted to the other end of the rotating shaft 9, and the second pneumatic finger 11 is provided with a turntable bearing 12, and the two ends of the turnta...

Embodiment 2

[0034] Such as Figure 1-3 As shown, a cleaning device used before evaporation includes a box body 1 and a box cover 2, the box body 1 is provided with a water tank 3, a power supply 4, a control device 5, a motor 6 and an electric cylinder 7, the Water tank 3, power supply 4, control device 5, motor 6 and electric cylinder 7 are all fixedly connected with box body 1, described motor 6 is provided with shaft coupling 8, and described shaft coupling 8 is connected with rotating shaft 9, so One end of the rotating shaft 9 is fixedly connected to the motor 6 through a coupling 8, and the first pneumatic finger 10 and the second pneumatic finger 11 for clamping the material to be evaporated are arranged in the box 1, and the motor 6 is located at On the left side of the first pneumatic finger 10, the first pneumatic finger 10 is bolted to the other end of the rotating shaft 9, and the second pneumatic finger 11 is provided with a turntable bearing 12, and the two ends of the turnt...

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PUM

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Abstract

The invention discloses cleaning equipment used before evaporation. The cleaning equipment comprises a box body and a box cover, the box body is provided with a water tank, a power supply, a control device, a motor and an electric cylinder, wherein the water tank, the power supply, the control device, the motor and the electric cylinder are both fixedly connected with the box body, a coupler is arranged on the motor, a rotating shaft is connected to the coupler, a first pneumatic finger and a second pneumatic finger which are used for clamping a to-be-evaporated object are arranged in the boxbody, a turntable bearing is arranged on the second pneumatic finger, the first pneumatic finger and the second pneumatic finger are electrically connected with the electric cylinder, a water pipe isarranged on the water tank, the water pipe is connected with the water tank through bolts, an electric water pump is arranged on the water pipe, the electric water pump is connected with a water pipeflange, and the motor, the electric cylinder and the electric water pump are electrically connected with the control device. The cleaning equipment used before evaporation can be used for effectivelycleaning the to-be-evaporated object.

Description

technical field [0001] The invention relates to a cleaning device used for evaporation before deposition and a cleaning method thereof. Background technique [0002] Evaporation is the process of evaporating or sublimating the substance to be filmed in a vacuum, so that it is deposited on the surface of the workpiece or substrate. It can deposit metals, semiconductors, semiconductors, etc. on the surface of metals, semiconductors, insulators, and even plastics, paper, and fabrics. Thin films of insulators, alloys with different composition ratios, compounds, and some organic polymers. [0003] However, the surface of the evaporated material needs to be cleaned before evaporation, and the existing cleaning equipment has a general cleaning effect on the evaporated material, and cannot effectively clean the evaporated material. Contents of the invention [0004] The technical problem to be solved by the present invention is to provide a cleaning device and cleaning method be...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/02B08B1/00C23C14/02
CPCB08B1/008B08B3/02C23C14/021
Inventor 不公告发明人
Owner 浙江环迪工贸有限公司
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