Detection method of vacuum manipulator anti-collision detection system based on multi-dimensional vision sensor

Abstract

The invention discloses a vacuum mechanical arm anti-collision detecting system based on a multi-directional visual sensor and a detecting method. The vacuum mechanical arm anti-collision detecting system based on the multi-directional visual sensor comprises a vacuum mechanical arm equipment system, an x-y-axis high-definition monitoring camera used for detecting the change of movement positionsand postures of a vacuum mechanical arm in the x-y-axis horizontal plane and a z-axis high-definition monitoring camera which is arranged perpendicular to the side face of a vacuum mechanical arm andused for detecting the position change of the vacuum mechanical arm in the extending and retracting axis direction. According to the vacuum mechanical arm anti-collision detecting system based on themulti-directional visual sensor and the detecting method, by establishing a visual system and feeding the positions, the speeds, the accelerated speeds and other information of the vacuum mechanical arm back to a control system in real time, when the position state abnormity of the vacuum mechanical arm appears in a security warning region, the visual system sends an abnormity waning signal to thecontrol system so that the control system can control the current running of the mechanical arm in time, the safety of the equipment system is guaranteed, and corresponding potential losses are avoided at much as possible.

Description

technical field [0001] The invention relates to the technical field of vacuum manipulator vision detection, in particular to a method for a vacuum manipulator anti-collision detection system based on a multi-dimensional vision sensor. Background technique [0002] At present, the vacuum manipulator is a robot used to process silicon wafers in a special clean environment. Its main function is to realize the fast, efficient and reliable transfer of silicon wafers between different stations. However, the safety issue of the vacuum robot has always been a very important issue in application. [0003] When the manipulator works with people or other equipment, accidental collision will cause great damage to the equipment system body or surrounding equipment (especially people), especially in the process of vacuum robot work, the collision will also cause wafer damage. damage and contaminate the vacuum chamber. [0004] How to detect the collision between other equipment or the s...

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Problems solved by technology

[0007] According to the above-mentioned technical problems, a detection method of a vacuum manipulator anti-collision detection system based on a multi-dimensional vision sensor is provided, which is used to solve the problem that the existing vacuum manipulators have front and rear movement directions, and if distance sensors are used in four directions at the same time The disadvantage of high cost

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