Detection method of vacuum manipulator anti-collision detection system based on multi-dimensional vision sensor

Abstract

The invention discloses a detection method of a vacuum manipulator anti-collision detection system based on a multi-dimensional visual sensor, which includes: a vacuum manipulator equipment system; an x-y axis high-definition monitoring camera, used to detect the x-y axis horizontal plane movement position and attitude of the vacuum manipulator changes; a z-axis high-definition monitoring camera, placed vertically on the side of the vacuum manipulator, is used to detect position changes in the direction of the telescopic axis of the vacuum manipulator. The detection method of the vacuum manipulator anti-collision detection system based on the multi-dimensional vision sensor of the present invention establishes a visual system and feeds back the position, speed, acceleration and other information of the vacuum manipulator in real time to the control system. When the abnormal position status of the vacuum manipulator occurs, In the safety warning area, the vision system sends an abnormal warning signal to the control system, so that the control system can promptly control and stop the operation of the current manipulator, thereby ensuring the safety of the equipment system and avoiding corresponding potential losses as much as possible.

Description

technical field [0001] The invention relates to the technical field of vacuum manipulator vision detection, in particular to a method for a vacuum manipulator anti-collision detection system based on a multi-dimensional vision sensor. Background technique [0002] At present, the vacuum manipulator is a robot used to process silicon wafers in a special clean environment. Its main function is to realize the fast, efficient and reliable transfer of silicon wafers between different stations. However, the safety issue of the vacuum robot has always been a very important issue in application. [0003] When the manipulator works with people or other equipment, accidental collision will cause great damage to the equipment system body or surrounding equipment (especially people), especially in the process of vacuum robot work, the collision will also cause wafer damage. damage and contaminate the vacuum chamber. [0004] How to detect the collision between other equipment or the s...

AI Technical Summary

Problems solved by technology

[0007] According to the above-mentioned technical problems, a detection method of a vacuum manipulator anti-collision detection system based on a multi-dimensional vision sensor is provided, which is used to solve the problem that the existing vacuum manipulators have front and rear movement directions, and if distance sensors are used in four directions at the same time The disadvantage of high cost

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