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arpes vacuum system, vacuum safety interlock system and vacuum safety interlock method

A technology of vacuum system and safety interlock, which is applied in general control system, control/regulation system, program control, etc., can solve the problems of non-universality, poor vacuum protection effect, and inability to realize automatic vacuum pumping mode, etc., to achieve improved The effect of the protective effect

Active Publication Date: 2020-09-15
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this vacuum protection interlock control system is only used for synchrotron radiation beamline stations, and is not universal, for example, it cannot be applied to the ARPES vacuum system; moreover, this vacuum protection interlock control system can only close the fast valve 4 when an accident occurs , Pneumatic door valve 3, water-cooled light screen 2, can not control the vacuum pump group, neither can realize automatic vacuum mode, nor can it automatically stop the pump, and the vacuum protection effect is poor

Method used

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  • arpes vacuum system, vacuum safety interlock system and vacuum safety interlock method
  • arpes vacuum system, vacuum safety interlock system and vacuum safety interlock method
  • arpes vacuum system, vacuum safety interlock system and vacuum safety interlock method

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Embodiment Construction

[0072] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, in the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0073] It should be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic ideas of the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the compo...

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Abstract

The invention provides an ARPES (angle resolved photoemission spectroscopy) vacuum system, a vacuum safety interlocking system and a vacuum safety interlocking method. The ARPES vacuum system comprises a vacuum pipeline; a mechanical fore pump, a first vacuum gauge, a first vacuum fore valve, a second vacuum fore valve, a third vacuum fore valve, a first molecular pump fore valve, a first molecular pump, a second molecular pump fore valve, a second vacuum gauge, a second molecular pump, a molecular pump valve, an ion pump valve, an ion pump, a sample preparation chamber and an analysis chamber; a chamber valve is arranged between the sample preparation chamber and the analysis chamber; the preparation chamber is connected with a third vacuum gauge and a fourth vacuum gauge; the analysis chamber is connected with a fifth vacuum gauge and an adsorbing pump; an adsorbing pump valve is arranged between the analysis chamber and the adsorbing pump; a condensing pump valve, a condensing pumpand a condensing pump gate valve are arranged sequentially on the vacuum pipeline between the first molecular pump and the analysis chamber.

Description

technical field [0001] The invention relates to the field of vacuum safety interlocking. In particular, it relates to an ARPES (Angle resolved photoemission spectroscopy, angle-resolved photoemission spectroscopy) vacuum system, a vacuum safety interlock system and a vacuum safety interlock method. Background technique [0002] Vacuum conditions, especially ultra-vacuum conditions, are necessary conditions for many technical applications. For example, synchrotron radiation beams are generated when electrons run at a speed close to light in a closed-loop vacuum electron storage ring. In order to maintain the normal operation of electronic storage rings and other equipment, it is necessary to protect and interlock the vacuum environment. [0003] Such as figure 1 As shown, the vacuum protection interlock control system in the prior art includes a front end 1, a water-cooled light screen 2, a pneumatic gate valve 3, a fast valve 4, a light valve 5, vacuum gauges 6, 7, 8, a pn...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/05
CPCG05B19/058G05B2219/163
Inventor 张凯莉沈大伟向兀刘吉山刘正太刘中灏樊聪聪刘万领卢祥乐
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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