Full-degree-of-freedom precision detecting device of machine tool linear movement running state

Abstract

The invention discloses a full-degree-of-freedom precision detecting device of a machine tool linear movement running state. The device comprises a standard ruler, a measuring unit and an installing unit, and the device can measure the linear bias and the angle bias of the linear motion shaft state at the same time; the reference ruler provides measurement standard for the full-degree-of-freedom precision measurement in a linear movement running state; the measuring unit can measure the linear bias and the angle bias of the linear movement running state; the installing unit can tightly connectthe measuring unit with the machine tool. The full-degree-of-freedom precision detecting device of a machine tool linear movement running state solves the problems of many time wastes of measurementand complex measurement processes caused by multi-plane separate measurement of linear bias and separate measurement of angle bias, and other problems; the full-degree-of-freedom precision detecting device has the advantages of being high in measuring efficiency, simple in structure, and convenient to install, and the like.

Description

technical field [0001] The invention belongs to the field of precision detection and performance evaluation of a linear motion device of a machine tool or a machine tool, and in particular relates to a full-degree-of-freedom precision detection device for the linear motion running state of a machine tool. Background technique [0002] The full-degree-of-freedom accuracy of linear motion operation is a key indicator of the performance of linear motion devices and machine tools. At present, commonly used measurement methods include level meter measurement method, flat ruler and indicator combined measurement method, and laser interferometer measurement method. Among them, the level meter measurement method measures the height difference between the obtained fulcrums step by step in an incremental manner to realize the linear error measurement of linear motion, and at the same time uses the height difference and its fulcrum span to realize the angle error (pitch, yaw) measuremen...

AI Technical Summary

Problems solved by technology

However, the measurement accuracy of the level measurement method is low, and the level measurement method can only realize the horizontal axis linear error measurement, pitch angle error measurement and yaw angle error measurement, but cannot realize the vertical axis linear error and tilt angle error measurement; The measurement planes are usually parallel, which can only measure the linear error and angular deviation in a single plane of the linear motion axis, but need to adjust the position of the ruler and the position of the indicator multiple times to achieve the full degree of freedom accuracy measurement of the linear motion axis. , so its measurement efficiency is low; in order to realize the full-degree-of-freedom precision detection of the linear motion state, the laser interferometer measurement method needs to go through multiple mirror group installations, optical path adjustments, etc., so it has high measurement time costs and complex measurement processes. and other shortcomings

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