Micro-hemispheric gyroscope with internal and external hyperboloid stereo electrodes

Abstract

The invention discloses a micro-hemisphere gyroscope with inner and outer hyperboloid three-dimensional electrodes. The micro-hemisphere gyroscope comprises a hemispherical resonant shell, outer curved surface three-dimensional electrodes are arranged above the outer surface of the hemispherical resonance shell, inner curved surface three-dimensional electrodes are arranged below the inner surfaceof the hemispherical resonant shell, plane bases of the outer curved surface three-dimensional electrodes and the inner curved surface three-dimensional electrodes are seal-connected through a sealing gasket, the tops of the outer curved surface three-dimensional electrodes are provided with a cap, the cap is provided with a group of lead drilling holes corresponding to the outer curved surface three-dimensional electrodes, the outer curved surface three-dimensional electrodes are corresponding to the inner curved surface three-dimensional electrodes or are staggered with the inner curved surface three-dimensional electrodes all around the hemispherical resonant shell and outer electrode capacitance gaps and inner electrode capacitance gaps are respectively formed. The inner and outer curved surface three-dimensional electrodes synchronously carry out gyroscope driving and signal detection, gaps between the electrodes and the hemispherical resonant shell are uniform, a sensing area islarge, the vibration information of a resonant shell structure can be fully sensed and a test on a gyroscope based on a capacitive differential technology is promoted.

Description

technical field [0001] The invention relates to the technical field of micro-mechanical electronics, in particular to a micro-hemispherical gyroscope with internal and external hyperboloid three-dimensional electrodes. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier. It has very important applications in the fields of attitude control, navigation and positioning. With the development of industries such as consumer electronics, industrial robots, vehicles, ship navigation, and drone manufacturing, the demand for gyroscopes is gradually developing in the direction of low cost, small size, high precision, and high reliability. Micro-electromechanical gyroscopes, which adopt micro-nano processing technology, have the characteristics of low mass production cost and good consistency, and have become a research hotspot in the field of gyroscopes. [0003] Micro-hemispherical gyroscopes have become ...

AI Technical Summary

Problems solved by technology

The maximum amplitude of the hemispherical gyro resonator is at the opening of the resonator, and as the distance from the opening increases, the amplitude of the resonator decreases sharply, which makes the internal electrodes unable to effectively complete the driving and detection tasks of the gyro

The outer electrode of the gyro is boron-doped silicon. Due to the limitation of the process, the depth of the electrode prepared by boron-doped silicon is limited, generally more than ten microns. Therefore, the effective sensing area of ​​the electrode and the resonator is also small, which cannot fully Insufficiency in realizing the driving detection task of the gyroscope

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