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Composite measurement system and measurement method of laser line scanning and shadow Moire measurement

Technology of a measurement system, laser line, used in the field of optical inspection

Active Publication Date: 2017-09-15
XIAN CHISHINE OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, phase moiré profilometry is not suitable for measuring objects with large steps on the surface

Method used

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  • Composite measurement system and measurement method of laser line scanning and shadow Moire measurement
  • Composite measurement system and measurement method of laser line scanning and shadow Moire measurement
  • Composite measurement system and measurement method of laser line scanning and shadow Moire measurement

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Experimental program
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Embodiment Construction

[0064] The present invention is described in further detail below in conjunction with accompanying drawing:

[0065] see figure 1 , 2 And 3, a laser light knife and shadow moiré fusion measurement method, specifically comprising the following steps:

[0066] The first step is to calibrate the system parameters.

[0067] Both the shadow moiré measurement system and the laser line scan measurement system require accurate calibration of system parameters. The parameters that need to be calibrated are: camera internal reference, projector internal reference, positional relationship among grating, projector, and camera. When the aperture and focal length of the camera are adjusted and the calibration plate is prepared, the calibration can be carried out. The calibration steps are as follows:

[0068] 1. Camera calibration and camera grating relative position calibration. Place the calibration board in the field of view of camera 2-3, change the pose of the calibration board, ...

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PUM

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Abstract

The invention discloses a composite measurement system and measurement method of laser line scanning and shadow Moire measurement. The method comprises steps of using the phase laser line scanning technology to carry out primary coarse measurement on a to-be-measured object; using the shadow Moire topography to carry out primary fine measurement on the to-be-measured object; and using the measurement result of the coarse measurement to assist phase unwrapping of fine measurement, thereby achieving accurate measurement of steps. A light source of a measurement device is a laser microvibration mirror projector, so quick laser line scanning can be achieved and overall uniform lighting can be provided for shadow Moire measurement. All the measurement is finished in one system, and the to-be-measured object does not need to move during the measurement, so measurement precision and measurement speed are ensured.

Description

technical field [0001] The invention belongs to the field of optical detection, and relates to a three-dimensional profile measurement method, in particular to a laser line scanning and shadow moiré profilometry fusion composite measurement method and a system thereof. Background technique [0002] As a bridge between the real world and the virtual digital world, 3D measurement technology plays an increasingly important role. It is widely used in many industries such as industrial inspection, medical health, digital entertainment, e-commerce, cultural relics protection, etc. Due to the advantages of non-contact, high precision and fast speed, optical three-dimensional measurement has developed into the most important technology in the field of three-dimensional inspection. [0003] The laser line scanning measurement method uses one or more laser light (light knife) images to reproduce the three-dimensional shape of the object, that is, extract the center position of the li...

Claims

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Application Information

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IPC IPC(8): G01B11/24G01B11/25
Inventor 周翔艾永旭杨涛金瑞
Owner XIAN CHISHINE OPTOELECTRONICS TECH CO LTD
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