Integral metal spring type active vibration reduction table

Abstract

The invention discloses an integral metal spring type active vibration reduction table. The integral metal spring type active vibration reduction table comprises a bottom plate (10) and an upper panel (60). Passive vibration isolation units and active vibration isolation units are arranged at the four corners of the bottom plate (10) correspondingly. The passive vibration isolation units are used for achieving high-frequency attenuation of the vibration reduction table and each comprise a metal spring assembly, vibration isolation rubber (50) and a structural damper. The active vibration isolation units are used for achieving active control over the vibration reduction table and each comprise a feedback speed sensor, a feedforward speed sensor, a Lorentz motor and a controller. According to the vibration reduction table, the vibration reduction technique combining passive vibration isolation with active vibration reduction is adopted, high-frequency vibration can be isolated comprehensively, low-frequency vibration can be effectively restrained, and the transmission rate of low-frequency vibration is ensured; and meanwhile, high attenuation rate of high-frequency vibration is achieved, full decoupling under six-degree of freedom control can be achieved, and application is flexible.

Description

technical field [0001] The invention belongs to the field of precision vibration reduction, and more specifically relates to an integral metal spring active vibration reduction table. Background technique [0002] With the continuous improvement of the precision of ultra-precision processing equipment and measuring instruments, the vibration of the working environment tends to be more micro-amplitude and low-frequency requirements, and thus more stringent requirements are put forward for the vibration reduction performance of the vibration isolation table. The traditional passive vibration isolation technology consists of mass-spring-damper. Due to the inherent contradiction between the transmission rate of low-frequency vibration and the attenuation rate of high-frequency vibration, it cannot meet the vibration reduction requirements of ultra-precision equipment. Therefore, some new technologies and new methods are urgently needed to improve this situation. [0003] Active...

AI Technical Summary

Problems solved by technology

[0009] (3) The active vibration isolation control platform uses a single-axis displacement sensor and a three-axis acceleration sensor in the structure, which cannot form a complete six-degree-of-freedom vibration isolation system

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