Post column filter with enhanced energy range

A technology of energy filtering and filtering, applied in the direction of circuits, discharge tubes, electrical components, etc.

Active Publication Date: 2017-05-10
FEI COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0036] A limitation of prior art PCF is the limited energy range in EELS mode

Method used

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  • Post column filter with enhanced energy range
  • Post column filter with enhanced energy range
  • Post column filter with enhanced energy range

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0099] figure 1 The EELS spectrum is schematically shown.

[0100] figure 1 Shown is the EELS spectrum showing the portion where the so-called nuclear loss occurs. Nuclear loss is the result of irradiating electrons hitting the atoms of the sample in such a way that the electrons of the atoms are knocked out of their outer shells. This vacancy is then refilled with another electron of the sample, as a result of which an X-ray photon is emitted. But the irradiated electrons that lost energy proceed in substantially the same direction to be imaged in the plane of incidence of the PCF.

[0101] figure 1 is a graph where along the horizontal axis is the energy loss (in eV) of electrons entering the PCF (and thus after passing through the sample) and along the vertical axis is the number of electrons (in arbitrary units). Since the number of electrons is strongly dependent on energy loss, the vertical scale is logarithmic. As seen, the number of electrons shows a jump at 1.96...

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PUM

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Abstract

The invention discloses a post column filter with enhanced energy range. The invention relates to a post-column filter (a PCF) for a (Scanning) Transmission Electron Microscope (a (S)TEM). Traditionally these filters use excitations of the optical elements before the slit plane that are identical in both the EFTEM and the EELS mode. Although this eases the task for the person skilled in the art of developing and tuning a PCF, as it reduces the number of degrees of freedom to a manageable amount. Inventors found ways to determine settings of the optical elements before the slit plane for EELS mode that are different from the EFTEM mode and where the performance of the PCF in EELS mode is improved (especially the relative energy range that can be imaged) without degrading the performance of the PCF in EFTEM mode.

Description

technical field [0001] The present invention relates to a method of operating a post-column filter (PCF) used in a (scanning) transmission electron microscope, the PCF being equipped to operate in a first mode, i.e. in which an electron energy loss spectrum (EELS spectrum) is formed ), the EELS spectrum shows the energy range, the PCF is equipped to operate in a second mode, the so-called EFTEM mode in which an energy-filtered transmission electron microscope image (EFTEM image) is formed, and PCF includes the following optical planes: [0002] The plane of incidence, [0003] an image plane in which the EELS spectrum is formed in the EELS mode and the EFTEM image is formed in the EFTEM mode, [0004] the slit plane between the incident plane and the image plane, where the energy scattering focus is formed in EFTEM mode, [0005] The PCF includes the following optics: [0006] an energy scatter element between the incident plane and the slit plane, the energy scatter eleme...

Claims

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Application Information

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IPC IPC(8): H01J37/26H01J37/28
CPCH01J37/261H01J37/265H01J37/28H01J37/263H01J2237/057H01J2237/1534H01J37/05H01J2237/2802H01J2237/055H01J37/26H01J2237/053H01J37/14H01J37/22
Inventor A.亨斯特拉P.C.蒂伊梅杰
Owner FEI COMPANY
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