A film system design and preparation method for reducing chromatic aberration caused by viewing angle changes
A technology of observation angle and film system design, applied in optical components, instruments, optics, etc., can solve the problems of inevitable changes in interference results and aggravated color uniformity.
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[0053] An embodiment of the present invention proposes a film system design and preparation method that reduces chromatic aberration caused by changes in viewing angles. Taking the large-area double-silver off-line low-emissivity coated glass coated by magnetron sputtering as an example, Table 1 shows the targets configured in the production line. position, target configuration, and the sequence of film layers determined by it. The substrate is float glass for construction with a thickness of 5.86mm; , Zn:Sn alloy target reactive sputtering to generate the corresponding film SiN x , ZnO x , ZnSnO x , using metal target sputtering to deposit the corresponding film layer Ag, NiCr.
[0054] Table 1 Production line double-silver configuration target position target material and corresponding film layer sequence
[0055] order
1
2
3
4
5
6
7
8
9
10
target
Si:Al
Zn:Al
Ag
NiCr
Zn:Sn
Zn:Al
Ag
NiCr
Zn:S...
Embodiment 2
[0075] One embodiment of the present invention proposes a film system design and preparation method for reducing chromatic aberration caused by changes in viewing angles. Taking the large-area single-silver off-line low-emissivity coated glass produced by magnetron sputtering as an example, using the method proposed by the present invention to reduce observation The film system design method that produces chromatic aberration due to angle changes, and optimizes the film system performance. Table 7 shows the target position, target material configuration and film system structure of a blue-gray single-silver coated glass production line with a transmittance greater than 50%. initial design. Table 8 shows the performance results of the initial design single silver film system.
[0076] Table 7 Initial design of single silver configuration target position, target material and film system in the production line (thickness: nm)
[0077]
[0078] Table 8 Performance of initial d...
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