Auto-focus device and auto-focus method during image scanning

A technology of automatic focusing and image scanning, applied in the field of optical imaging, can solve problems such as lack of application technology, and achieve the effect of small size, low cost and improved clarity

Active Publication Date: 2019-05-10
苏州睿仟科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the prior art, there is still a lack of relevant application technologies

Method used

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  • Auto-focus device and auto-focus method during image scanning
  • Auto-focus device and auto-focus method during image scanning
  • Auto-focus device and auto-focus method during image scanning

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Embodiment Construction

[0027] The specific implementation of the present invention will be described in further detail below by describing the embodiments with reference to the accompanying drawings, so as to help those skilled in the art have a more complete, accurate and in-depth understanding of the inventive concepts and technical solutions of the present invention.

[0028] Such as image 3 The structure of the present invention shown is an automatic focusing device during image scanning, including a platform 1 (XYstage), a lens 2 (lens), a piezoelectric ceramic device 3 (lens piezo) and an image acquisition device 4 .

[0029] In order to solve the problems existing in the prior art and overcome its defects, and realize the invention purpose of fast, real-time and automatic focus during detection and scanning, the technical solution adopted by the present invention is as follows:

[0030] Such as image 3 As shown, in the automatic focusing device during image scanning of the present inventio...

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Abstract

The invention discloses an automatic focusing device for image scanning, comprising a platform (1), a lens (2), piezoelectric ceramic equipment (3) and image acquisition equipment (4), wherein the image acquisition equipment (4) Set up an imaging sensor. The invention also discloses a method related to the above device. Using the above technical scheme, using computer data processing, piezoelectric ceramic adjustment device and an imaging sensor, use the sharpness of three images focused on different focal planes to determine whether they have been focused, and perform a test on the image of the detected object with large unevenness Fast, real-time, and automatic focus, improve the clarity of its image, its size is small, and the cost is low.

Description

technical field [0001] The invention belongs to the technical field of optical images and relates to digital image processing technology. More specifically, the present invention relates to an automatic focusing device during image scanning. In addition, the present invention also relates to a method related to the device. Background technique [0002] The depth of field of an optical inspection system generally decreases as the resolution increases. [0003] Such as figure 1 As shown, when the object to be detected, such as flat panel display, semiconductor wafer or biomedical slice itself, is curved more than this depth of field, it is necessary to design an automatic focusing system to make each image keep it clear. [0004] However, in the prior art, there is still a lack of relevant application technologies. Contents of the invention [0005] The invention provides an automatic focusing device during image scanning, the purpose of which is to realize focusing qui...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04N5/232H04N5/225
CPCH04N23/54H04N23/67H04N23/951H04N23/64
Inventor 伍祥辰
Owner 苏州睿仟科技有限公司
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