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Universal compensation mirror based on deformable mirror and design method

A technology of deforming mirror and compensating mirror, applied in measurement devices, instruments, optical devices, etc., can solve problems such as nano-level free-form surface shape errors, and achieve the effects of reducing design difficulty, easy calibration and adjustment, and simple structure

Active Publication Date: 2016-02-24
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of nanoscale freeform surface error detection, to propose a quasi-universal compensation mirror based on deformable mirror and its design method

Method used

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  • Universal compensation mirror based on deformable mirror and design method
  • Universal compensation mirror based on deformable mirror and design method
  • Universal compensation mirror based on deformable mirror and design method

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Embodiment

[0034] The specific parameters of the large-diameter free-form surface measured in this example are as follows:

[0035] Diameter: 110mm; Aspheric coefficient: -1.3; Vertex curvature radius: 500mm;

[0036] Additional Zernike higher-order terms for face shape: Z 4 = -8.2515; Z 5 = -9.789732; Z 9 = -1.271369;

[0037] The first-stage compensator obtained by the above design method is a single lens, and the parameters are as follows:

[0038] R 1 =167.25mm,R 2 =2899.68mm, thickness d=35.6mm, and the material is commonly used K9 glass.

[0039] Add a deformable mirror, model the system in the optical design software Zemax, optimize the surface parameters of the deformable mirror, and finally get the surface type of the second-stage compensator (using the Zernike polynomial Z 4 -Z 29 Characterization):

[0040] Z 4 =-0.1453,Z 5 =0.08622,Z 6 =9.50E-4,Z 7 =-4.69E-3, Z 8 =1.65E-3,Z 9 =0.0379,Z 10 =3.13E-3,Z 11 =0.0448,Z 12 =0.0155,Z 13 =7.51E-4,Z 14 =-2.12E-3,Z 1...

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Abstract

The invention relates to a universal compensation mirror based on a deformable mirror and a design method, aims to detect surface morphology of a free curved surface through laser interference and belongs to the photoelectric detection field. The compensation mirror comprises a first level compensator and a second level compensator. Through the design method, low-order aberration of the detected free curved surface is calculated by firstly utilizing a primary Seidel aberration formula, parameters of the first level compensator are acquired through employing an aberration matching and paraxial formula algorithm; a catadioptric system is established by utilizing software, and residual high-order aberration can be compensated as much as possible by utilizing the second level compensator. According to the compensation mirror and the design method, the deformable mirror is taken as the second level compensator and is for surface morphology detection on the free curved surface, so one compensator can be utilized to detect free curved surfaces in multiple types, design difficulty and processing fee of compensators can be reduced to a maximum degree, moreover, through the compensation detection method, the structure is simple, introduced error sources are reduced, early-stage calibration adjustment is easy, and instantaneous and high precision surface morphology measurement can be realized.

Description

technical field [0001] The invention relates to measuring the shape of a free-form surface by laser interferometry, and belongs to the field of photoelectric detection. The purpose is to utilize the characteristics of deformable mirrors to realize the design of one-to-many compensation mirrors, and at the same time, it can improve the measurement accuracy of free-form surface detection. Background technique [0002] Due to the high degree of freedom of its surface shape, the freeform surface can greatly reduce the size and quality of the optical system. On this basis, it can further improve the imaging quality of the system, and it is more and more widely used in modern optical systems. However, due to its high detection difficulty, the processing accuracy of free-form surfaces has not been guaranteed. Large-caliber high-precision free-form surface processing and inspection is still a major problem in the field of optical inspection. [0003] At present, the commonly used f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 胡摇王劭溥郝群
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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