Dynamic point diffraction interferometer on the basis of micro-polaroid array

Abstract

The present invention discloses a dynamic point diffraction interferometer on the basis of a micro-polaroid array. The dynamic point diffraction interferometer on the basis of micro-polaroid array comprises: a laser, a beam spread collimation system, a polarizer, a first quarter wave plate, a focusing lens, a diffraction template located at the focus of the focusing lens, a second quarter wave plate in a diffraction light path, a measured piece, an imaging lens, a micro-polaroid array and a photosensitive element. A part of light diffracted in the small hole of the diffraction template reaches the measured piece through the second quarter wave plate, and the light reflected by the measured piece is reflected by the diffraction template through the second quarter wave plate and is received by the photosensitive element through the imaging lens and the micro-polaroid array; and the other part of the light diffracted in the small hole of the diffraction template is directly received by the photosensitive element through the imaging lens and the micro-polaroid array. One time exposure of the dynamic point diffraction interferometer on the basis of the micro-polaroid array may obtain four phase shift images, so that real time detection effect is reached; and devices for generating phase shift are simplified, and the vibration resistance requirement is reduced.

Description

technical field [0001] The invention belongs to the field of optical measurement, in particular to a dynamic point diffraction interferometer based on a micro-polarizer array. Background technique [0002] The micropolarizer array is a device used to measure the light intensity of each polarization direction after the light passes through the polarizers with different transmission directions. It is usually used in conjunction with an image sensor (such as a digital camera) to obtain the The obtained images of each polarization component can be implemented for phase shift analysis. At present, the preparation methods of micropolarizer arrays are mainly based on polyvinyl alcohol film etching, based on optically controlled alignment of liquid crystal materials, and based on metal nano-gratings. [0003] With the continuous improvement of high-tech cutting-edge fields such as microelectronics and aerospace, the requirements for the accuracy of optical spherical surfaces are co...

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Problems solved by technology

[0006] In order to solve the problems existing in the above-mentioned prior art, the present invention proposes a point diffraction interferometer based on a micropolarizer array to obtain multiple phase-shifted images in one exposure, which solves the need for multiple exposures of traditional point diffraction interferometers. In order to obtain multiple phase-shifted images, at the same time, the device used to generate phase shift in the previous point diffraction interferometer is simplified, which can realize real-time detection and reduce the anti-vibration requirements

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