Honeycomb-shaped disc-shaped vibrating gyro

Abstract

The invention provides a honeycomb-shaped disc-shaped vibrating gyro which comprises a harmonic oscillator and electrodes arranged in or / and outside the harmonic oscillator. The harmonic oscillator is in a disc shape which is overall in axisymmetry. The center of the disc-shaped harmonic oscillator is an anchoring point used for fixing the whole harmonic oscillator, and a circle of round harmonic rings are arranged on the outer edge of the disc-shaped harmonic oscillator. The structures for connecting the harmonic rings and the anchoring point are honeycomb-shaped frames which are distributed periodically in the circumferential direction and are in a honeycomb topology shape, a plurality of rings of hexagonal holes distributed periodically in the circumferential direction are formed in the honeycomb-shaped frames, and the whole honeycomb-shaped frames and a circular ring form a harmonic structure of the harmonic oscillator. The electrodes used for conducting driving, detecting and controlling can be arranged inside or outside the harmonic oscillator or arranged inside and outside the harmonic oscillator at the same time. The honeycomb-shaped disc-shaped vibrating gyro has the advantages that large harmonic mass is achieved, the number of driving electrodes is large, the detection capacitance area is large, and the number of control electrodes is large.

Description

technical field [0001] The invention relates to a micro-electromechanical gyroscope, and in particular to a MEMS honeycomb-shaped disc-shaped vibrating gyroscope. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is a core device in the fields of motion measurement, inertial navigation, and guidance control. It is very important in aerospace, intelligent robots, guided munitions and other high-end industrial equipment and precision strike weapons. Value. Traditional gyroscopes include mechanical rotor gyroscopes, electrostatic gyroscopes, hemispherical resonant gyroscopes, laser gyroscopes, fiber optic gyroscopes, and dynamic tuning gyroscopes. Although they have high precision, they are difficult to meet the requirements in terms of volume, power consumption, and price. MEMS gyroscopes based on microelectromechanical system technology have the characteristics of small size, low powe...

AI Technical Summary

Problems solved by technology

Traditional gyroscopes include mechanical rotor gyroscopes, electrostatic gyroscopes, hemispherical resonant gyroscopes, laser gyroscopes, fiber optic gyroscopes, dynamic tuning gyroscopes, etc. Although they have high precision, they are difficult to meet the requirements in terms of size, power consumption, and price.

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