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Aberration-free absolute inspection method of ellipsoidal surface

An inspection method and ellipsoid technology, applied in the field of optical inspection, can solve the problems of high production cost and affect the test accuracy, and achieve the effect of high accuracy and easy operation

Active Publication Date: 2015-06-10
NAT UNIV OF DEFENSE TECH
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Problems solved by technology

In this method, the difference between the aspheric wave and spherical wave generated by the double CGH will affect the test accuracy, and the double CGH is used as a holographic compensator, which is expensive to manufacture and is only suitable for a specific aspheric surface

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  • Aberration-free absolute inspection method of ellipsoidal surface
  • Aberration-free absolute inspection method of ellipsoidal surface
  • Aberration-free absolute inspection method of ellipsoidal surface

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Embodiment Construction

[0032] Figure 1 to Figure 5 An embodiment of the aberration-free absolute inspection method of an ellipsoidal surface of the present invention is shown, the method includes the following steps:

[0033] S1: Measurement: Use the spherical wave interferometer 2 and the spherical mirror 3 to perform aberration-free zero position inspection and cat's eye position inspection on the ellipsoid 1, and perform the following sub-steps specifically:

[0034] S11: The spherical wave interferometer 2 sends a spherical test wave to the ellipsoid 1, and the spherical center 4 of the spherical test wave coincides with the far focus f1 of the ellipsoid 1, and the spherical mirror 3 is placed between the spherical wave interferometer 2 and the ellipsoid 1 and the spherical mirror 3 faces the ellipsoidal surface 1, the center of curvature 5 of the spherical mirror 3 coincides with the near focal point f2 of the ellipsoidal surface 1, and the aberration-free zero position test is carried out and...

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Abstract

The invention discloses an aberration-free absolute inspection method of an ellipsoidal surface. The method comprises the steps of firstly, performing aberration-free zero detection on the confocal position of the ellipsoidal surface by use of a spherical wave interferometer and a spherical reflector to obtain detection results W1 and W2, secondly, performing twice detection on the cat eye position of the spherical reflector to obtain detection results W3and W4, and finally, calculating the absolute surface shape error inspection result T of ellipsoidal surface according to the formula T=(W1-W2+2W3-2W4) / 4. According to the aberration-free absolute inspection method, the system error of the spherical wave interferometer and the surface shape error of the spherical reflector are completely separated out by use of four inspection positions and the absolute inspection result of the ellipsoidal surface is obtained; the method has the advantages of simple operations and high accuracy.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to an aberration-free absolute inspection method of an ellipsoid. Background technique [0002] The wave surface interferometer is commonly used in the inspection of optical surface shape error. The wave surface interferometer is usually equipped with a standard plane lens or spherical lens, which emits a plane test wave or a spherical test wave, and can perform zero inspection on the optical plane or spherical surface, that is, if there is no error in the measured surface shape, an interferogram with zero fringes will be obtained. For aspheric surface inspection, it is necessary to use a specially designed compensator to convert the plane or spherical test wave emitted by the interferometer into an aspheric wave that matches the measured aspheric surface. Quadratic aspheric surfaces such as ellipsoids, hyperboloids, and paraboloids can use the properties of a...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 陈善勇戴一帆李圣怡彭小强石峰王贵林
Owner NAT UNIV OF DEFENSE TECH
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