High-speed nano precision movement control method and system for piezoelectric ceramic driver

Abstract

The invention discloses a high-speed nano precision movement control method and system for a piezoelectric ceramic driver and belongs to the technical field of movement control and precision manufacturing. The high-speed nano precision movement control method for the piezoelectric ceramic driver comprises firstly establishing a magnetic hysteresis nonlinear accurate model H [.] and an inverse character expression H <-1> [.] and designing a feedforward controller based on the H [.] to eliminate magnetic hysteresis nonlinearity of the piezoelectric ceramic driver; identifying a linear dynamic model G (s) of a piezoelectric ceramic driver with magnetic hysteresis compensation through a system identification method and designing an initiative damp controller which is used for increasing the gain margin of the system according to dynamic characteristics of the G (s); finally achieving high-speed nano precision movement control through a PID (Proportion Integration Differentiation) control algorithm. The high-speed nano precision movement control method for the piezoelectric ceramic driver can eliminate piezoelectric ceramic driver magnetic hysteresis nonlinearity and resonance vibration influences to the system movement speed and precision, is convenient and practical and can achieve real-time control.

Description

technical field [0001] The present invention relates to a method and system in the field of motion control and precision manufacturing technology, in particular to a high-speed nano-precision motion control method and system for a piezoelectric ceramic driver based on a dynamic system of hysteresis nonlinearity and linear dynamics in series . Background technique [0002] With the development of nanotechnology, precision manufacturing equipment has higher and higher requirements for nanometer motion precision. Motor drivers in the traditional sense can no longer meet the demanding requirements of this precision movement, and smart material drivers that can directly convert electrical or magnetic energy into mechanical energy are needed. Due to the advantages of high displacement resolution, large driving force, high stiffness, high bandwidth, and fast response speed, piezoelectric ceramic actuators are increasingly used. However, in actual control, the piezoelectric cerami...

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Problems solved by technology

However, the defects and shortcomings of this technology are: 1) the dynamic hysteresis model is required, which increases the modeling complexity of the system; 2) the control must be combined with the neural network; 3) this method only focuses on the tracking accuracy and does not consider How to increase tracking speed with controls

However, the defects and shortcomings of this technology are: 1) The piezoelectric ceramic actuator is simply regarded as a linear system, but in practice, the hysteresis nonlinearity of the piezoelectric ceramic actuator has non-smooth characteristics, and the linearized disturbance observer cannot theoretically Solve this kind of nonlinear control problem; 2) This method only focuses on tracking accuracy, and does not consider how to improve tracking speed through control

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