A phase plate nano-focusing unit and its design method
A nano-focusing and phase plate technology, applied in the field of synchrotron radiation optics and synchrotron radiation beamline engineering
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[0075] By adopting the method of the invention, aiming at the requirements of the high-throughput hard X-ray nano-probe beam line station, a phase plate-type nano-focusing lens structure is designed.
[0076] (1) Select the X-ray energy as E=19.5keV, the focal length as f=50mm, the aperture as D=400μm, and the lens material as silicon. The refractive index of silicon where δ=1.27×10 -6 , β=5.09×10 -9 . At this time, the numerical aperture of the lens is NA=4mrad.
[0077] (2) if figure 1 As shown, select the optical axis direction as the z-axis, the horizontal direction as the x-axis, and take the A that is -50mm away from the focus 0 The point is used as the coordinate origin to establish the coordinate system.
[0078] (3) Take the coordinate origin A 0 With (0,0) as the starting point and the reference focus F, a Fresnel waveband with a phase period of 2π is established, with a total of 6290 waveband structures. Boundary point A of the first 5 Fresnel bands 1 、A ...
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