Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform

Abstract

The invention relates to an independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform and belongs to precise scientific microscopic observation instruments. The platform is composed of X-axis, Y-axis and Z-axis precise movable assemblies, X-axis and Z-axis rotary assemblies, X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies and a super-view deep observation lens. The X-axis, Y-axis and Z-axis precise movable assemblies and the X-axis and Z-axis rotary assemblies can be used for respectively carrying out precise adjustment on relative positions and relative angles of the super-view deep observation lens in X, Y and Z directions of an observation test piece; the X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies can realize active following of the test piece in microseismic movement relative to a load in the X, Y and Z directions; and the Y-axis precise movable assembly can assist the super-view deep lens in zooming. The super-view deep lens is used for carrying out super-view deep observation on the shape of a microcosmic surface of the test piece. The independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform has the advantages of ingenious volume, precise driving, good following effects, high integration and strong practicability, can be used independently and can also be combined other equipment to use.

Description

technical field [0001] The invention relates to a precision scientific microscopic observation instrument, in particular to an independent five-degree-of-freedom ultra-precision material in-situ testing microscopic observation platform integrating ultra-depth-of-field microscopic observation, precision driving and active following. It can provide in-situ monitoring for various materials under different load states, and reveal the mechanical properties and damage mechanism of materials at the micro-nano scale. ) technology and other high-tech industries have an extremely important role in promoting the development. Background technique [0002] Material testing technology is an important means and method for material science and engineering applications. All parts are inevitably subjected to force or temperature in the actual use process. After certain use conditions and use time, the material will undergo deformation, wear, surface pitting and other failure phenomena. Micr...

AI Technical Summary

Problems solved by technology

[0004] There are still some deficiencies in the current in-situ observation equipment: (1) The current commercial microscopes are difficult to meet the large-stroke lens movement capability, which restricts the in-situ observation of large specimens; (2) Due to the influence of the external environment, in some The specimen under load is often in a state of micro-vibration, and it is difficult for the current commercial microscopes to follow the specimen synchronously to ensure stable imaging of the observed area; (3) the cavity of the scanning electron microscope and atomic force microscope Space is very limited, making it difficult to observe specimens in situ at the macro scale

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