Cycle-type chirp structure plasma excimer spectra absorption device based on nano impressing technique

Abstract

The invention discloses a cycle-type chirp structure plasma excimer spectra absorption device based on a nano impressing technique. The device comprises a substrate, a first metal layer, an insulator layer and a second metal layer, wherein the first metal layer, the insulator layer and the second metal layer are sequentially positioned on the substrate, and form a plurality of plasma resonant cavities; the plasma excimer spectra absorption device is provided with a plurality of compression cavities impressed based on the nano impressing technique; a plurality of grating structures are formed among the compression cavities; the grating cycle is linear chirped at least in the X direction, or the Z direction or both of the two directions. According to the invention, the band width of a whole forbidden band is realized and increased through appropriately adjusting the grating chirped coefficient and the die pressing depths of the resonant cavities of the upper metal layer / the insulator layer / the lower metal layer, and the probability for achieving a low and flat reflection forbidden band is provided. Under the restriction conditions of phase matching and the sub-wavelength size, through appropriate design, the approximate perfect absorption of a wide band can be realized.

Description

technical field [0001] The invention relates to the technical field of surface plasmon resonance cavity, in particular to a periodic chirped structure plasmon spectrum absorption device based on nanoimprinting technology. Background technique [0002] Metals are often used as high-efficiency reflectors. However, the metal surface with micro-nano structure can become a high-efficiency absorber in a large range of electromagnetic waves (from visible light, infrared to microwave). This has generated enormous interest over the past few years. In 2008, Landry et al proposed and demonstrated an almost completely absorbing metamaterial structure. It consists of two metamaterial resonant cavities. However, it has a significant obstacle in practical application. The structures on the two parallel planes separated by the substrate are different. One side is an electric ring resonant cavity and the other side is a slice. In 2009, Hu et al achieved near-perfect absorption in the vis...

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Problems solved by technology

However, this structure only absorbs 70% of the incident light in the 2.5 μm band range at the 8.5 μm wavelength.

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