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Actuator-free surface shape accurate measurement device and method

A precision measurement and actuator technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of measurement speed influence, deformation, and measurement accuracy, and achieve high measurement accuracy, fast measurement speed, and avoid lighting angles bad effect

Active Publication Date: 2013-09-11
HUNAN CHANGZHONG MACHINERY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method has two disadvantages. One is that the moving up and down of the stage requires an actuator, which affects its measurement speed. The other is that for non-rigid samples, it will deform during the up and down movement. Affect measurement accuracy

Method used

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  • Actuator-free surface shape accurate measurement device and method

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Experimental program
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specific Embodiment 1

[0024] Such as figure 1 As shown, the curved surface shape precision measurement device includes a multi-angle illumination optical path and a curved surface shape measurement optical path;

[0025] The multi-angle illumination optical path is placed in sequence along the direction of light propagation: light source (1), condenser lens (2), pinhole (3), collimator lens (4), transmissive liquid crystal spatial light modulator (5), light splitter The prism (6) and the sample to be measured (7); the condenser lens (2) converges the beam emitted by the light source (1) on the pinhole (3), and the beam emitted from the pinhole (3) passes through the collimating lens (4) After collimation, it enters the transmissive liquid crystal spatial light modulator 1 (5) in parallel, is modulated by the transmissive liquid crystal spatial light modulator 1 (5), emits in parallel, and is reflected by the dichroic prism (6) to irradiate the sample in parallel (7) surface;

[0026] The optical ...

specific Embodiment 2

[0033] Such as figure 2 As shown, the curved surface shape precision measurement device includes a multi-angle illumination optical path and a curved surface shape measurement optical path;

[0034] The multi-angle illumination optical path is placed in sequence along the direction of light propagation: an ideal point light source, a collimator lens (4), a transmissive liquid crystal spatial light modulator (5), a dichroic prism (6) and a tested sample (7), The light beam emitted by the ideal point light source is collimated by the collimator lens (4), and then incident on the transmissive liquid crystal spatial light modulator one (5) in parallel, modulated by the transmissive liquid crystal spatial light modulator one (5), and exits in parallel. The spectroscopic prism (6) reflects and irradiates the surface of the tested sample (7) in parallel;

[0035] The optical path of the curved surface shape measurement is placed sequentially along the light propagation direction wi...

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Abstract

The invention relates to actuator-free surface shape accurate measurement device and method and belongs to the field of 3D surface appearance measurement. The device comprises a multi-angle lighting path and a surfaced shape measurement light path. In the multi-angle lighting path, beams from a light source sequentially pass a collecting lens, a pinhole and a collimating lens before parallelly coming into a first transmissive liquid-crystal space light modulator; after being modulated, the beams radiate out in parallel; after being reflected by a first beam splitter prism, the beams parallelly irradiate the surface of a measured sample. In the surface shape measurement light path, beams reflected by the measured sample sequentially pass a second beam splitter prims, a second transmissive liquid-crystal space light modulator and an imaging objective before being imaged by an image sensor. According to the method, the first transmissive liquid-crystal space light modulator and the second transmissive liquid-crystal space light modulator are used together to obtain different-layer images of the measured sample at different lighting angles, the images are integrated by selecting the optimal lighting angle, and the surface shape of the measured sample is constructed. The actuator-free surface shape accurate measurement device and method have the advantages of high measurement precision and high speed.

Description

technical field [0001] A non-executing mechanism precision measuring device and method for curved surface shape belongs to the field of three-dimensional surface topography measurement. Background technique [0002] Three-dimensional surface topography measurement plays an important role in the field of modern precision measurement, which promotes the development of micro-mechanical structure processing, electrical component detection, biological cell research and other fields. However, because the existing measuring device uses light to irradiate the surface of the sample to be measured naturally, some special structures cannot be distinguished, resulting in low accuracy of the measurement results, or even inaccurate measurement results. In addition, the existing technology for three-dimensional surface topography measurement is mainly to place the sample to be tested on the stage, and the stage moves up and down to carry the sample to be tested and move up and down to real...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 万正喜肖熳
Owner HUNAN CHANGZHONG MACHINERY
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