Instantaneous phase-shifting interferometry instrument for detecting microsphere surface topography and method for measuring microsphere surface topography using the measuring instrument

Abstract

Disclosed is an instantaneous phase shifting interferometer for detecting microsphere surface morphology and measuring method of microsphere surface morphology using same. The interferometer and measuring method relates to the field of optical detection space object three-dimensional morphology, and solve the problems of low detecting efficiency in current similar technologies, poor lateral resolution capability, isolated defect points easy to miss, difficulty in producing reference surface and low accuracy and the like. A reference light is transmitted to an optical collimator through a single mode fiber to form an incident reference beam after collimation. A measuring beam forms an incident measuring beam vertical to the incident reference beam after transmission, the incident reference beam and the incident measuring send to a third beam polarization splitting prism and then combine into one beam, and divide into four parallel beams through a fourth beam polarization splitting prism and a fifth beam polarization splitting prism in order. The four parallel beams forms four different faculas at an area array CCD after adding into different phase shifting quantities through a wave plate array. The measuring method obtains the microsphere surface morphology of measured microspheres by performing image processing on four faculas. The device and method is suitable for quick test of microsphere surface morphology.

Description

technical field [0001] The invention relates to an instantaneous phase-shifting interferometry instrument for detecting microsphere surface topography and a method for measuring microsphere surface topography by using the measuring instrument, which belongs to the technical field of optical detection of three-dimensional topography of space objects. Background technique [0002] As one of the most commonly used forms of components, microspheres are widely used in aerospace, military, industrial, medical and many other fields. The surface accuracy of microspheres has a crucial impact on their performance. Although traditional detection methods for tiny spherical surfaces, such as atomic force microscopes and confocal microscopes, have high longitudinal measurement accuracy, when the single measurement range is very small and high-precision mechanical scanning motion devices are required to achieve overall three-dimensional shape measurement At the same time, due to the single...

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Problems solved by technology

[0003] The present invention aims to solve the problem that the detection range of a single measurement is too small, it is easy to miss isolated defect points, the manufacturing of the reference surface is difficult and the precision is not high, the contrast of the interference field is low, and the traditional time-domain phase-shifting interferometer Problems that are seriously affected by environmental factors (vibration, air disturbance), and then provide an instantaneous phase-shifting interferometry instrument for microsphere surface topography detection and a method for measuring microsphere surface topography using this measuring instrument

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