Continuous drying module for use in semiconductor integrated manufacturing production line
A production line and semiconductor technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of high manufacturing cost and complex structure of drying equipment, achieve continuous drying and realize the effect of modular design
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[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0021] Please refer to figure 1 , a continuous drying module used in a semiconductor integrated manufacturing production line, including a housing 1, the lateral sides of the housing 1 are respectively provided with an inlet 11 and an outlet 12 for the conveyor belt 2 to pass through, and the conveyor belt 2 passes the The casing 1 is divided into an upper cavity 13 and a lower cavity 14, and the entrance 11 and the exit 12 of the casing 1 are respectively provided with roller groups 3 for dynamically clamping the conveyor belt 2, and each of the roller groups 3 includes a sticker The upper roller...
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