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Method and device for measuring pixel pitch of image sensor by utilizing constant moving point target

An image sensor and pixel pitch technology, applied in measurement devices, optical devices, instruments, etc., can solve problems such as defocusing, and achieve the effects of improving repeatability, amortizing errors, and reducing errors

Active Publication Date: 2014-08-13
HARBIN INST OF TECH
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Problems solved by technology

[0041] The present invention aims at the problem that the above-mentioned existing measurement method is not suitable for measurement in a small field of view, and the problem that the existing measurement device has defocus, and proposes a method and device for measuring the pixel pitch of an image sensor in the frequency domain. Improves the repeatability of measurement results within the field; the device can eliminate the influence of defocus on measurement results

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  • Method and device for measuring pixel pitch of image sensor by utilizing constant moving point target
  • Method and device for measuring pixel pitch of image sensor by utilizing constant moving point target
  • Method and device for measuring pixel pitch of image sensor by utilizing constant moving point target

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Embodiment Construction

[0064] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0065] figure 1It is a structural schematic diagram of an image sensor pixel pitch measuring device using a moving point target at a constant speed; the device includes a point target 1, an optical system 2, an image sensor 3, a slider 4, a first guide rail 5 perpendicular to the optical axis direction, and a controller 7. The point target 1 described above is imaged onto the surface of the image sensor 3 through the optical system 2; and, the device also includes a second guide rail 6 along the optical axis direction, and the slide block 4 carrying the point target 1 is installed on the first guide rail 5 and the second guide rail 6, when the controller 7 controls the slider 4 to move at a constant speed on the first guide rail 5, the controller 7 controls the slider 4 to move on the second guide rail 6, and the movement in the tw...

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Abstract

A method and a device for measuring pixel pitch of an image sensor by utilizing a constant moving point target belong to the field of length, width or thickness measurement characterized by applying an optical method. The method for measuring the pixel pitch of the image sensor by utilizing the constant moving point target includes: acquiring a linear image by implementing an image formation when the point target constantly moves, searching for a value range of the pixel pitch in a frequency domain, and calculating to obtain the pixel pitch by utilizing a genetic algorithm according to the fact that an contact ratio between a practical modulation transfer function curve which is related to the pixel pitch and a theoretical modulation transfer function curve is the best under least squares conditions. Sliding blocks bearing the point target in the device for measuring the pixel pitch of the image sensor by utilizing constant moving point target is arranged on a first guide rail and a second guide rail, a controller controls the sliding block to uniformly move on the first guide rail while controlling the sliding block to move on the second guide rail, and the movements of the sliding blocks are matched with each other so that the point target is subjected to quasi focal imaging to the surface of the image sensor during motion . By adopting the method for measuring the pixel pitch of the image sensor by utilizing the constant moving point target, error among single measurement results can be reduced so that repeatability of the measurement results can be improved.

Description

technical field [0001] The method and device for measuring the pixel pitch of an image sensor using a uniform moving point target belong to the field of measuring length, width or thickness in the field of measuring equipment characterized by the use of optical methods, and particularly relate to a point light source that uses a uniform moving linear motion as the target. The invention discloses a measurement method and device for measuring the pixel pitch of an image sensor by using a constant velocity moving image modulation transfer function in the frequency domain. Background technique [0002] Image sensor pixel pitch is a very important technical indicator in the field of precision measurement. For example, if a target with a known size is imaged through an optical system, the size of the target image can be known according to the number of pixels of the image sensor occupied by the target image and the pixel pitch, and finally the size of the target image can be compa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/14G01M11/02
Inventor 谭久彬赵烟桥刘俭
Owner HARBIN INST OF TECH
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