Tunable polarization wavelength vertical-cavity surface-emitting laser and preparation method thereof

Abstract

The invention provides a tunable polarization wavelength vertical-cavity surface-emitting laser and a preparation method thereof. A sub-wavelength grating with effective refractive index anisotropy is prepared by adopting a semiconductor micro-nano processing method, is etched in a resonant cavity of the tunable polarization wavelength vertical-cavity surface-emitting laser, and can be equivalent to an aniaxial negative crystal with a certain thickness; by using a form birefringence effect, a TE (transverse electric) and a TM (transverse magnetic) polarization modes respectively meet different F-P (fluorescence polarization) tool equations in the resonant cavity, and have separated resonance wavelengths; and the TE polarization mode wavelength is positioned in the center wavelength, the TE polarization mode needs lower threshold gain, is preferably excited, and the TM polarization mode is inhibited, thus the tunable polarization wavelength vertical-cavity surface-emitting laser has the function of stably outputting wavelength polarization in a process of continuously tuning the wavelength.

Description

technical field [0001] The invention relates to the field of semiconductor optoelectronic technology and micro-nano opto-electromechanical system technology, in particular to a polarization-wavelength-tunable vertical-cavity surface-emitting laser and a preparation method thereof. Background technique [0002] The wavelength tunable vertical cavity surface emitting laser is based on the vertical cavity surface emitting laser and integrated with the structure of the micro-nano opto-electromechanical system to change the effective cavity length of the laser and realize the continuously adjustable wavelength of the light-emitting device. Wavelength tunable vertical cavity surface emitting lasers have very broad application prospects in dense wavelength division multiplexing technology and all-optical networks. Among them, the micromechanical tunable vertical cavity surface emitting laser uses micromechanical electrostatic tuning to achieve continuous wavelength output under the...

AI Technical Summary

Problems solved by technology

The high-contrast grating is used to control the polarization. Since the high-contrast grating is a single-layer structure with a thickness of hundreds of nanometers, when the grating is released by wet etching, the grating will inevitably be corroded and damaged by the corrosion of the sacrificial layer. The method increases the difficulty of craft production, and the yield rate is very low

However, the method of using the curvature of different crystal orientations of the mirror to achieve polarization is not easy to control the stress and curvature of the mirror during epitaxy, and it is difficult to achieve stable and uniform polarization.

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