Vacuum transmission processing equipment and method

A technology of vacuum transmission and process equipment, which is applied to conveyor objects, transportation and packaging, and final product manufacturing, etc., can solve problems such as low production efficiency, and achieve the effect of small occupied space, elimination of different processing strengths, and high processing quality.

Active Publication Date: 2014-01-22
KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the defect of low production efficiency of the vacuum process method in the prior art, and provide a kind of equipment with high production efficiency, high processing quality, relatively compact equipment structure, low difficulty in mechanical design, and Vacuum transfer process equipment with high operating reliability and corresponding vacuum transfer process method

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  • Vacuum transmission processing equipment and method
  • Vacuum transmission processing equipment and method
  • Vacuum transmission processing equipment and method

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Embodiment Construction

[0024] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings to describe the technical solution of the present invention in detail.

[0025] refer to figure 1 , figure 2 and Figure 7 The vacuum transmission process equipment of the present invention firstly includes a vacuum process chamber 1, and at least one processing device 2 is arranged in the vacuum process chamber 1, and each processing device 2 has a processing area, when the workpiece passes through the processing area. It will be processed by this processing device 2. In all the figures of the present invention, only one of the above-mentioned processing devices 2 is schematically depicted, and the processing area of ​​this processing device 2 is denoted by area A. In FIG. The present invention does not limit the type of workpiece, for example, it may be a solar wafer. The present invention does not limit the type of processing device, for example, it m...

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Abstract

The invention discloses vacuum transmission processing equipment and a vacuum transmission processing method. The vacuum transmission processing equipment comprises a vacuum processing cavity, wherein the vacuum processing cavity is provided with at least one processing device, and the processing device is provided with a processing region; the two ends of the vacuum processing cavity are respectively provided with one or two piece in-out cavities; each in-out piece cavity is correspondingly provided with a transmission platform, the moving flat surface of each transmission platform is same and respectively corresponding to each transmission platform alternate motion of the piece in-out cavities on the two ends of the vacuum processing cavity; and a position of each piece in-out cavity opposite to the vacuum processing cavity results in the fact that the directions that each transmission platform moves to the vacuum processing cavity from the corresponding piece in-out cavity and moves back the corresponding piece in-out cavity from the vacuum processing cavity is perpendicular to the moving direction of each transmission platform in the vacuum processing cavity. The equipment and the method provided by the invention are capable of realizing high production efficiency.

Description

technical field [0001] The invention relates to vacuum process technology, in particular to a vacuum transmission process equipment and a corresponding vacuum transmission process method. Background technique [0002] New energy is one of the five most decisive technological fields in the world's economic development in the 21st century, and solar energy is a clean, efficient and inexhaustible new energy. In the new century, governments of all countries regard the utilization of solar energy resources as an important content of the national sustainable development strategy. Photovoltaic power generation has many advantages such as safety, reliability, no noise, no pollution, less constraints, low failure rate, and easy maintenance. In recent years, with the rapid development of the international photovoltaic power generation industry, the supply of solar wafers exceeds the demand, so improving the photoelectric conversion efficiency of solar wafers and the production capacit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/677H01L31/18
CPCY02P70/50
Inventor 陈炯钱锋
Owner KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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