Resonance type optical fiber F-P sensor and method of producing same

Abstract

The invention provides a resonant mode fiber Fabry sensor with good optical performance and adjustable measuring range, comprising fiber and protective fiber, wherein a fiber Fabry resonant membrane is in contact joint between the fiber and the protective fiber; the end face of the fiber Fabry resonant membrane is plated with a photo-thermal membrane; the end face of the protective fiber is provided with a microflute which is arranged on the contact-joint surface of the fiber Fabry resonant membrane; the end face of the fiber or the fiber Fabry resonant membrane is provided with a groove which forms a Fabry cavity, and the optical reflecting surface of the Fabry cavity is a plane. The resonant mode fiber Fabry sensor changes the measuring range by changing the thickness or shape of the fiber Fabry resonant membrane, and the length or weight of the center of the hardness quantity. The optical reflecting surface is a plane; therefore, the sensor has good optical performance. The sensor can be used as a temperature sensor, a pressure sensor, a strain sensor, a magnetic field sensor, a vibration sensor, and the like.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing, in particular to a resonant optical fiber FP (FP) sensor and a manufacturing method thereof. technical background [0002] In recent years, with the rapid development of biology, medicine, energy, environment, aerospace, military and other fields, very urgent requirements have been put forward for the miniaturization, light weight, low energy consumption and harsh environment resistance of sensors. Micro-nano sensors It has become one of the major scientific and technological frontier hotspots in the world. The rapid development of laser microprocessing technology provides new technical means for the research of a new generation of micro-nano optical fiber sensor devices. Therefore, how to apply modern micro-nano processing technologies such as lasers to realize various micro-nano functional sensor devices on optical fibers is the key to the future development of optical fiber senso...

AI Technical Summary

Problems solved by technology

[0004] In fiber optic sensors, the sensors used for temperature, strain and pressure measurement are mainly fiber Bragg gratings (FBG) and Fabry interferometers. Applications are limited

Due to the small cross-sensitivity between temperature and other measured values, the Fab sensor is very suitable for temperature, strain and pressure measurement. However, the current fiber optic Fab sensor uses a catheter to connect two sections of optical fiber, which has poor mechanical stability and is not durable. High temperature, its production mainly relies on manual production and packaging, and its yield and product repetition rate cannot be guaranteed

[0005] JP2001280922 and W02005121697 disclose a F-P sensor, which is only suitable for multimode fiber due to the use of corrosion process, the sensor cavity must be multimode fiber, the production efficiency is low, and it is difficult to achieve large-scale manufacturing; It is difficult to make a pressure sensor by cutting the optical fiber; one optical reflective surface of the FAP sensor is a corroded curved concave surface, and its reflection performance is not good, resulting in poor optical performance of the FAP sensor and low contrast of the sensor reflection stripes (<10dB), so that the measurement accuracy is limited; one end of the sensor is a multi-mode fiber, the sensor has a large insertion loss, poor optical performance, and the connection loss with the existing ordinary single-mode fiber is large, and it is difficult to reuse

[0006] In addition, these sensors generally need to obtain external physical quantities through the method of testing spectra during the test process, so the overall cost of the test system is relatively high

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