Double offset parameter circle contour measurement model and biased error separation method

Abstract

A double offset parameter circle contour measurement model and an offset error separation method belong to the technical field of surface shape measurement. The model simultaneously includes two offset error components: offset error of the detected component (e, Alpha) and offset error d of the measuring head of a sensor. The measurement model is that Rho i is equal to ecos(Theta i-Alpha)+((ro+Delta ri)<2>-(d+esin(Theta i - Alpha))<2>)<1 / 2>. The method of parameter optimization is adopted to realize accurate estimation and direct solving of offset error parameters and other parameters in the model, thus separating the offset parameters one by one from the measuring data and acquiring the actual circle contour of the detected piece. The measurement model provided by the invention can completely and accurately reflect the influence of the offset error parameters to the measurement of the circle contour and overcome the problems of principle defect and low parameter estimation accuracy existed in the generally used measurement model at the present time.

Description

technical field [0001] The invention belongs to the technical field of surface shape measurement, in particular to a method for separating a circular profile measurement model with double offset parameters and an offset error. Background technique [0002] Roundness error is an important technical parameter to control the quality of rotary parts. With the rapid development of precision engineering technology and national defense cutting-edge technology, a large number of ultra-precision rotating body parts are widely used, such as circular standards used for comparison and calibration - the roundness error of the designated circular section of the quartz standard hemisphere is generally 5nm ~ 50nm Between; the roundness of the electrostatic levitation gyro rotor is required to be within 10nm, all of which put forward extremely high requirements for the ultra-precision measurement of the roundness error. [0003] Offset error is an important source of error affecting the ult...

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Problems solved by technology

[0005] Taiwanese scholar Cha′o-Kuang Chen simply mentioned that the offset error of the sensor probe will affect the accuracy of the measurement in the precision measurement of roundness, but did not propose how to accurately solve the error (Cha ′o-Kuang Chen. The study on the error separation and eccentricity self-compensation methods for improving the precision of a roundness machine. Proceedings of the Second International Symposium on Instrumentation Science and Technology, 2002, (1), 459-465)

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