Counting device, distance meter, counting method, and distance measuring method
A technology of counting equipment, distance meter, applied in the field of distance meter
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no. 1 example
[0045] The present invention is a technique for measuring distance based on an interference signal between emitted waves and waves reflected by an object when sensing using wavelength modulation. Therefore, this technique can be applied to optical interferometers other than self-mixing type interferometers and interferometers other than optical interferometers. The case of self-mixing using a semiconductor laser will be described in detail below. When the oscillation wavelength of the semiconductor laser is changed while applying the laser beam from the laser to the measurement target, the displacement of the measurement target is reflected in the number of MHPs while the oscillation wavelength is changed from the minimum oscillation wavelength to the maximum oscillation wavelength (or, from the maximum oscillation wavelength wavelength changes to the minimum oscillation wavelength). Therefore, by checking the number of MHPs when the oscillation wavelength is changed, the sta...
no. 2 example
[0134] Next, a second embodiment of the present invention will be described. In the first embodiment, the count result is corrected by using the median value as a representative value of the MHP cycle. However, it is also possible to use the mode number as a representative value of the period.
[0135] Assume that the frequency distribution of the MHP cycle is shifted from the correct distribution j shown in FIG. 21 to the distribution k shown in FIG. 21 . In this case also the median value of the MHP period is shifted from the correct value T0 to the value Td. In this case, if the count result is corrected using the median value Td, the error in the corrected count result increases.
[0136] Therefore, if the influence of the shift of the frequency distribution due to the noise component is conceivable, the mode is used as a representative value of the period. More specifically, the representative value calculation unit 842 of the count result correction unit 84 calculates...
no. 3 example
[0146] In the first and second embodiments, the MHP waveform is extracted from the output signal of the photodiode 2 . The photodiode 2 serves as a light receiving device that converts the light output of the semiconductor laser 1 into an electric signal. However, the MHP waveform can be extracted without using the photodiode 2. FIG. 22 shows the configuration of a distance meter according to a third embodiment of the present invention. The same reference numerals as in FIG. 1 denote the same elements in FIG. 22 . The distance meter in this embodiment uses a voltage detection circuit (signal acquisition device) 13 instead of the photodiode 2 and voltage / current conversion amplifier 5 in the first embodiment.
[0147] The voltage detection circuit 13 detects and amplifies the voltage between the terminals of the semiconductor laser 1 , that is, the voltage between the anode and the cathode. When interference is caused by the self-mixing effect between the laser beam emitted ...
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