Image-forming spectral measurement device
A measurement device and imaging spectrum technology, which is applied in the direction of measurement device, optical radiation measurement, spectrometry/spectrophotometry/monochromator, etc., can solve the problems of large error in measurement results, etc., and meet the requirements of improving accuracy and working conditions Effect of low and high measurement accuracy
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[0020] Referring to Fig. 1, the present invention comprises spectral imaging camera 5, the optical path measurement compensation device that is connected with spectral imaging camera 5, and this optical path measurement compensation device comprises reflection mirror 3 and deformable mirror DM2 (Deformable mirror), deformable mirror DM2 is arranged on spectral On the incident light path of the imaging camera 5, the mirror 3 is arranged on the incident light path of the deformable mirror DM2. By adjusting the deformable mirror DM2, the compensation of the optical path difference in the light path can be realized, thereby eliminating the error of measuring the target spectrum and improving the spectrum. The accuracy of the measurement. The optical path measurement compensation device also includes a DM drive circuit 1, a wave phase difference measurement unit 6, a narrow band filter 4 and a half mirror 7, the deformable mirror DM2 is connected with the wave phase difference measu...
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