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Tension mask assembly for vacuum deposition organic electrofluorescent device film

A technology of vacuum deposition and electroluminescence, applied in electroluminescence light source, electric solid device, vacuum evaporation coating and other directions, can solve the problems of total spacing error, damage to organic layer and so on

Inactive Publication Date: 2008-11-05
SAMSUNG DISPLAY CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0021] Although the traditional mask described above is supported by a mold frame and made of magnetic material that has a magnetic attraction to the target substrate, some inherent problems still occur, such as thin bar spacing due to the weight and tensile strain of the mask. Variations in organic layers due to increased attraction to the glass substrate, damage to the organic layer when handling and moving the mask, and total pitch error due to internal stress in the mask and frame

Method used

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  • Tension mask assembly for vacuum deposition organic electrofluorescent device film
  • Tension mask assembly for vacuum deposition organic electrofluorescent device film
  • Tension mask assembly for vacuum deposition organic electrofluorescent device film

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Embodiment Construction

[0038] Reference will now be made in detail to some embodiments of the present invention, examples of which will be illustrated in the accompanying drawings, wherein like numerals refer to like elements throughout the several views.

[0039] One embodiment of the mask frame assembly for vacuum deposition of thin films of organic electroluminescent (EL) devices according to the present invention is Figure 4 shown. see Figure 4 , the mask frame assembly includes a mold frame 30 and a mask 100, and the two edges of the mask are supported by the mold frame 30 under tension.

[0040] The mold frame 30 includes support members 31 and 32 parallel to each other, and elastic members 34 and 35 connected to edges of the support members 31 and 32 to form a rectangular opening 33 . The mold frame 30 should have sufficient rigidity to apply tension to the unit mask 110 described later. The mold frame 30 may have any structure as long as no interference is formed between the target subs...

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Abstract

A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.

Description

[0001] Cross-references to related applications [0002] This patent application claims the benefit of priority from Korean Patent Application No. 2001-76490 filed with the Korean Industrial Property Office on December 5, 2001, the contents of which are incorporated herein by reference. technical field [0003] The invention relates to a metal mask, and more particularly to a mask frame assembly for depositing thin films of organic electroluminescent devices. Background technique [0004] Recently, an electroluminescent (EL) device called a self-luminous type display device has been attracting attention as a next-generation display device due to its advantages of wide viewing angle, good contrast, and quick response characteristics. [0005] EL devices can be classified into inorganic EL devices and organic EL devices according to their emission layer materials. Compared with inorganic EL devices, organic EL devices can realize color display and have better brightness and r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/40H05B33/10C23C14/04C23C14/12C23C14/24H01L51/00H01L51/50H01L51/56
CPCH01L51/56H01L51/001C23C14/042H10K71/164H10K71/00H05B33/10
Inventor 姜敞皓
Owner SAMSUNG DISPLAY CO LTD
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