Multi-channel Langmuir probe diagnostic system for calibration of regional plasma distribution

Abstract

The present disclosure provides a multi-channel Langmuir probe diagnostic system for calibrating regional plasma distribution, including: a plurality of Langmuir probes, a multi-channel current acquisition circuit and a processor, each Langmuir probe The detection end is set at different positions in the area to be tested, the Langmuir probe is connected to the current acquisition circuit, and the processor is connected to the current acquisition circuit; the processor obtains the plasma parameters according to the received current signal of each Langmuir probe, According to the obtained plasma parameters and the position information of each Langmuir probe, the regional plasma distribution can be obtained; the design of multiple parallel channels can obtain real real-time plasma distribution, making up for the existing technology to achieve multi-channel acquisition through channel switching At the same time, through the parallel processing of multi-channel data, more accurate plasma distribution results are obtained.

Description

Technical field [0001] The present disclosure relates to the field of plasma detection technology, in particular to a multi-channel Langmuir probe diagnostic system for calibrating regional plasma distribution. Background [0002] The statements in this section merely provide background technology related to this disclosure and do not necessarily constitute prior art. [0003] Plasma is a common substance in the universe, widely existing in stars, interplanetary space and the ionosphere around the Earth, is the main form of interstellar matter existence, often regarded as the fourth state of matter in addition to the three states of gaseous, liquid and solid matter. [0004] In the field of plasma diagnostics, Langmuir probes have become an effective diagnostic technique with a wide range of applications due to their simple structure and reliable results. The Longmuir probe diagnostic method is to immerse a metal electrode into the plasma, and then use the control circuit to appl...

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Problems solved by technology

The plasma in the vacuum chamber needs to be artificially excited, and most of them use glow discharge to generate plasma, but because the plasma source is usually placed at one end of the vacuum chamber, the plasma in the chamber shows inhomogeneity in space, and according to Experiments have shown that the inhomogeneity of plasma distribution will affect the development of diagnostic experiments in some cases and affect the credibility of experimental results.

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