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Wafer tray positioning mechanism and wet method fence lifting and fixing device

A tray positioning and fixing device technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems affecting production efficiency, wafer tray deformation, etc., and achieve the effect of improving production efficiency

Pending Publication Date: 2020-06-09
紫石能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The main purpose of the present invention is to provide a wafer tray positioning mechanism and a wet rail lifting and fixing device to solve the problem in the prior art that the wafer tray in the wet rail lifting and fixing device is deformed and affects production efficiency

Method used

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  • Wafer tray positioning mechanism and wet method fence lifting and fixing device
  • Wafer tray positioning mechanism and wet method fence lifting and fixing device
  • Wafer tray positioning mechanism and wet method fence lifting and fixing device

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Embodiment Construction

[0027] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0028] Such as Figure 1 to Figure 7 As shown, the wafer tray positioning mechanism of this embodiment includes: a fixing seat 10 , an installation seat 20 , a first driving part 30 , a lifting assembly 40 and a pressing assembly 50 . The first driving part 30 is installed on the fixing base 10 and connected with the mounting base 20 , and the first driving part 30 is used to drive the mounting base 20 to move along the first direction. The pressing component 50 and the lifting component are respectively arranged on the mounting seat 20 . The holding assembly 40 includes a holding portion, and the holding portion is used to hold up the wafer tray 100 that completes the removal of the wafer. ...

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Abstract

The invention provides a wafer tray positioning mechanism and a wet method fence lifting and fixing device. The wafer tray positioning mechanism comprises a fixed seat, a mounting seat, a first driving part, a supporting assembly, and a pressing assembly. The first driving part is mounted on the fixed seat and connected with the mounting seat, and the first driving part is used for driving the mounting seat to move in the first direction; the pressing assembly and the supporting assembly are arranged on the mounting base; the supporting assembly comprises a supporting part, the supporting partis used for supporting the wafer tray where the wafer is taken out, the pressing assembly comprises a pressing part, the pressing part is used for pressing the wafer tray where the wafer is taken out, the distance between the supporting part and the pressing part can be adjusted in the second direction, and the first direction is perpendicular to the second direction. According to the technical scheme, the problem that in the prior art, a wafer tray in a wet method fence lifting and fixing device deforms, and consequently the production efficiency is affected is effectively solved.

Description

technical field [0001] The invention relates to the technical field of wet fences, in particular to a wafer tray positioning mechanism and a lifting and fixing device for wet fences. Background technique [0002] In the solar cell manufacturing industry, the lifting and fixing device of the railing in the wet equipment can also be applied to the semiconductor field. [0003] The wet stage is a special carrier for loading wafers with thin films. In the thin-film battery manufacturing process, it is necessary to put the wafer into the wet process, and after the wet process, it is necessary to take the wafer out of the wet process. The inside of the wet bar is stacked with layers of wafer trays, and each wafer tray can hold a wafer. When putting in and taking out the wafer, it is necessary to lift the upper wafer tray to complete the corresponding action. [0004] In the wet process, the wafer tray is soaked in high-temperature chemical liquid, and the wafer tray goes throug...

Claims

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Application Information

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IPC IPC(8): H01L21/68H01L21/687
CPCH01L21/68H01L21/68742
Inventor 邹金成王敬苗申兵兵唐海峰何金正
Owner 紫石能源有限公司
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