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Compensation method and device for temperature drift of test wavelength based on Faper etalon

A compensation method and etalon technology, applied in the direction of measuring device, measuring optics, optical radiation measurement, etc., can solve the problem of low measurement accuracy of laser wavelength

Active Publication Date: 2021-05-18
RAINBOW SOURCE LASER RSLASER
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  • Description
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  • Application Information

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Problems solved by technology

[0006] The embodiment of the present invention provides a method and device for compensating the temperature drift of the test wavelength based on the Faber etalon, so as to at least solve the technical problem of low measurement accuracy of the existing laser wavelength

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  • Compensation method and device for temperature drift of test wavelength based on Faper etalon
  • Compensation method and device for temperature drift of test wavelength based on Faper etalon
  • Compensation method and device for temperature drift of test wavelength based on Faper etalon

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Embodiment 1

[0044] According to an embodiment of the present invention, a method for compensating the temperature drift of the test wavelength based on the Faber etalon is provided, see figure 1 , including the following steps:

[0045] S101: separating a part of the laser light emitted by the tunable laser;

[0046] S102: Absolute calibration is carried out to this part of the laser, and the outer shell temperature of the Faber etalon is T 0 , calculate the λ of the calibration wavelength 0 ; where λ 0 is the case temperature of the Fapper etalon is T 0 , the wavelength value of the absorption line of the hollow cathode lamp;

[0047] S103: Periodically collect the shell temperature T of the Faber etalon and measure the wavelength λ of the separated part of the laser using the Faber etalon, and smooth the acquired shell temperature T of the Perkin etalon, according to λ 0 , T 0 , λ, T correct the wavelength of the test to get the corrected wavelength λ corr .

[0048] The tempera...

Embodiment 2

[0061] According to another embodiment of the present invention, a kind of compensation device of the test wavelength temperature drift based on the Faber etalon is provided, see figure 2 ,include:

[0062] A laser separation unit 10, configured to separate a part of the laser light emitted by the laser;

[0063] Absolute wavelength calibration unit 20, comprising a Fappet etalon and a hollow cathode lamp, collects the test T of the Fappet etalon housing 0 , perform absolute calibration on the part of the separated laser light, and calculate the λ of the calibration wavelength 0 ; where λ 0 is the case temperature of the Fapper etalon is T 0 , the wavelength value of the absorption line of the hollow cathode lamp;

[0064] The Faper temperature drift feedback unit 30 is used to measure the shell temperature T of the Faper etalon and measure the wavelength λ of the separated laser light using the Faber etalon, and is also used to smooth the acquired temperature T, and acco...

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Abstract

The invention relates to the field of laser wavelength detection, in particular to a method and device for compensating the temperature drift of the test wavelength based on a Faber etalon. The method and device separate a part of the laser light emitted by the tunable laser; perform absolute calibration on the part of the laser light, and calculate the λ of the calibration wavelength 0 , T 0 ; Obtain the wavelength λ and the shell temperature T of the Faber etalon, and according to λ 0 , T 0 , λ, T correct the wavelength of the test to get the corrected wavelength λ corr , the method and device adopt the mechanism of Faper temperature drift feedback, which compensates the drift of the test wavelength due to the temperature change of the Faper etalon, and improves the measurement accuracy and stability of the wavelength; the method of calibrating the hollow cathode lamp ensures that the laser The absolute accuracy of wavelength improves the stability and accuracy of wavelength measurement. The invention solves the problem that the temperature detection error of the Fappet etalon is equivalent to the amplitude of the temperature changing with time, and improves the accuracy and stability of the center wavelength of the laser.

Description

technical field [0001] The invention relates to the field of laser wavelength detection, in particular to a method and device for compensating the temperature drift of the test wavelength based on a Faber etalon. Background technique [0002] In the wavelength full-scale calibration, the wavelength is generally measured accurately by using the Fap etalon, and the deviation between the measured value and the standard value measured by the wavelength meter is calculated in real time, forming a closed-loop feedback mechanism, and then controlling the wavelength value of the laser radiation. The error is within the accuracy of the measured value. However, due to the influence of laser radiation, ambient temperature and pressure, the temperature of the Fap etalon will change, and the density of the gas in the Fap etalon will also change due to the change of temperature, which will lead to a change in the refractive index and affect the Fapling interference fringes. distribution,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/02H01S3/13
CPCG01J9/0246G01J2009/0257H01S3/13
Inventor 李亚飞刘广义江锐韩晓泉殷青青沙鹏飞冯泽斌
Owner RAINBOW SOURCE LASER RSLASER
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