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Tool for quartz wafer arranging machine

A technology of quartz wafers and chip arranging machines, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as scattered wafer arrangement, and achieve the effect of weakening the influence of magnetic force, avoiding mutual friction, and prolonging the service life.

Active Publication Date: 2019-09-24
CHENGDU KINGBRI FREQUENCY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Tooling that can solve the possible problems of scattered wafer arrangement and provide internal positioning function of equipment

Method used

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  • Tool for quartz wafer arranging machine
  • Tool for quartz wafer arranging machine
  • Tool for quartz wafer arranging machine

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Experimental program
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Embodiment Construction

[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0028] The invention discloses a tooling for a quartz wafer stacker, which includes a tray and a carrier plate.

[0029] Such as figure 1 , figure 2 and image 3 , the tray includes an upper disc 4 and a lower disc 5, the lower disc 5 is rectangular, the lower disc 5 is provided with two circular holes A3, and the two circular holes A3 are symmetrical to the axis of the lower disc 5, the carrier disc 6 includes a rectangular portion and an isosceles trapezoidal portion, the bottom of the isosceles trapezoidal portion coincides with one long side of the rectangular portion, the axis of the isosceles trapezoidal portion coincides with the axis of the lower disc 5, and the carrier disc 6 is provided with Wafer placement slot 1, the profile of the upper disc 4 is ...

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Abstract

The invention discloses a tool for a quartz wafer arranging machine. The tool comprises a tray and a carrier tray. The tray comprises an upper tray and a lower tray. The lower tray is rectangular and provided with two large circular holes with the same diameter. The two sides of the upper tray are adaptive to a section of circular arc of the large circular holes. The lower tray is further provided with seven cylinders, and the space formed by the cylinder position is adaptive to the upper tray. The overall shape of the carrier tray is the same as that of the upper tray. The space formed by the cylinder position is adaptive to the carrier tray. The cylinder height is not less than the sum of the thickness of the upper tray and the thickness of the carrier tray. The carrier tray is provided with multiple wafer placing grooves. The carrier tray is further provided with two small circular holes and two protrusions. The objective of the present invention is to provide the tool which is placed directly inside the wafer arranging machine and can solve problems that may occur in the scattered arrangement of wafers and provide the positioning function inside the equipment.

Description

technical field [0001] The invention relates to the technical field of wafer slicer equipment, in particular to a tooling for a quartz wafer slicer. Background technique [0002] Quartz crystal resonator is a piezoelectric device made of piezoelectric quartz (that is, crystal), which not only has highly stable physical and chemical properties, but also has extremely small elastic vibration loss. Compared with other electronic components, piezoelectric quartz crystals also have high frequency stability and high Q value, making them an important component for frequency stabilization and frequency selection. With the wide application of digital circuits, the market demand for crystal components is also steadily increasing. Put the jig directly into the wafer stacker for operation. Since the jig is tightly attached by magnets, when the jig is taken out of the equipment due to magnetic adsorption, improper operation will occur and the placed wafers will be broken up, resulting i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/673H01L21/68H01L21/683
CPCH01L21/67H01L21/673H01L21/68H01L21/683
Inventor 刘青彦杨清明黄建友
Owner CHENGDU KINGBRI FREQUENCY TECH
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