Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Apparatus for combined stem and eds tomography

A tomographic, equipped technique for application in the field of composition-based tomography

Inactive Publication Date: 2019-07-05
INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
View PDF13 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Even though larger area detectors are being developed, it is not always possible to place these larger detectors closer to today's known configurations due to structural constraints such as the lens system 10 described above and shadowing effects samples in

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Apparatus for combined stem and eds tomography
  • Apparatus for combined stem and eds tomography
  • Apparatus for combined stem and eds tomography

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0043] The invention relates to an apparatus for STEM tomographic analysis combined with EDS-based tomographic analysis, having the following characteristics:

[0044] the sample is cylindrical and is held at the end of an elongated sample holder, which allows a rotation of the sample in the range of at least 180°, preferably 360°, about the longitudinal axis of the holder,

[0045] At least two EDS detectors are provided on opposite lateral sides of the sample with their detection surfaces perpendicular to and intersecting the sample plane, defined as passing through the longitudinal axis of the sample holder and perpendicular to the electron beam direction plane,

[0046] • A STEM detection configuration is provided, which can be arranged as known from existing tools.

[0047] figure 2 An arrangement according to a preferred embodiment of the invention is illustrated. As in prior art arrangements, an electron gun (not shown) generates an electron beam propagating in a be...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention is related to an apparatus for tomographic analysis of a specimen (20) based on STEM images of the specimen, as well as for tomographic analysis of the chemical composition of the specimen based on X-ray detection by EDS detectors, the apparatus comprising an elongated specimen holder (21) that is rotatable about a longitudinal axis (101) and being configured for holding a pillar-shaped specimen (20) at the end of the holder, with said longitudinal axis (101) being positioned in a sample plane (22), the sample plane being perpendicular the beam direction (100), at least two EDS detectors (16,17), each SDD having a detecting surface (16',17') oriented perpendicularly to the sample plane (22) and intersecting with said sample plane, and wherein the two EDS detectors (16,17) arepositioned on opposite lateral sides of the specimen (20).

Description

technical field [0001] The present invention relates to tomographic analysis of samples by scanning transmission electron microscopy and composition-based tomography of samples by energy dispersive X-ray spectroscopy. Background technique [0002] Tools for transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) are well known in the art. Most of these tools allow tomographic analysis of samples by exposing them to an electron beam, where the sample is tilted through a range of tilt angles about an axis perpendicular to the beam direction, allowing a sequence of 2D images of the sample to be obtained. Images are acquired on the basis of transmitted electrons. In TEM, a large diameter electron spot is used on the sample, and the image is projected through an electromagnetic lens system and captured on a phosphor screen combined with a CCD camera. In STEM, a sample is scanned by a finely focused beam and images are simultaneously construct...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01N23/2251G01N23/20091
CPCG01N23/2252G01N23/2251H01J37/1478H01J37/20H01J37/244H01J37/28H01J2237/20214H01J2237/2442H01J2237/24495H01J2237/2802
Inventor H·班德尔
Owner INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com