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A flexible micro-nano optical fiber angle sensing chip, sensor and preparation method

A micro-nano optical fiber and angle sensing technology, which is applied in the direction of converting sensor output, using optical devices to transmit sensing components, instruments, etc., can solve problems such as difficult to be practical and susceptible to interference from environmental factors, and achieve anti-electromagnetic interference capabilities Strong, improved operability, simple processing effect

Active Publication Date: 2020-11-06
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Recently, micro-strain sensors based on micro-nano fibers have been reported. Since the micro-nano fibers used are exposed to the air and are easily disturbed by environmental factors, although they exhibit high sensitivity, they are difficult to put into practical use.

Method used

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  • A flexible micro-nano optical fiber angle sensing chip, sensor and preparation method
  • A flexible micro-nano optical fiber angle sensing chip, sensor and preparation method
  • A flexible micro-nano optical fiber angle sensing chip, sensor and preparation method

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Embodiment Construction

[0023] The preparation method and structure of the flexible micro-nano optical fiber angle sensing chip and sensor of the present invention will be described below by taking polydimethylsiloxane (PDMS) and standard communication optical fiber (outer diameter 125 μm) as examples.

[0024] Because the refractive index of silica micro-nano fiber is about 1.45, in order to make the periphery of the micro-nano fiber generate a larger proportion of the evanescent field after being embedded in a flexible material, which is conducive to obtaining higher sensing sensitivity, the preferred solution is Make the flexible material have a higher index of refraction than air. In addition, if the refractive index of the flexible material is higher than that of the micro-nano fiber, the light cannot be confined to propagate inside and outside the micro-nano fiber, and the sensing function cannot be realized. For this reason, in this embodiment, the refractive index of the flexible material is ...

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Abstract

The invention discloses a flexible micro-nano fiber angle sensing chip, which comprises a flexible substrate and a fiber taper, and is characterized in that a stretching portion, taper transition areas and part of unstretched portions at two ends of the fiber taper are embedded in the flexible substrate, and a bending part of the flexible micro-nano fiber angle sensing chip is located in the stretching portion of the fiber taper. When the micro-nano fiber sensing chip is bent, an output light intensity signal becomes smaller because of increase in bending loss of the micro-nano fiber and refractive index of a polymer, so that angle sensing is realized. In addition, the flexible micro-nano fiber angle sensing chip can realize ultra-high-sensitivity angle sensing. The micro-nano fiber is embedded in the flexible material, so that the micro-nano fiber can be free from interference of external environment factors. The flexible micro-nano fiber angle sensing chip has good stability, mechanical strength and anti-electromagnetic interference capacity.

Description

technical field [0001] The invention relates to a sensor based on a micro-nano optical fiber, in particular to an angle sensor based on a micro-nano optical fiber and a preparation method thereof, belonging to the field of optical fiber sensing. Background technique [0002] With the development of wearable devices, robots, and human-computer interaction devices, flexible sensors have become a research hotspot in today's science, and flexible angle sensors are crucial to the development of the above fields. Flexible angle sensors play an important role in the fields of gesture detection, human joint motion monitoring, and robotic hand control, and have broad application prospects in the fields of rehabilitation medicine, robotics, and human-computer interaction in virtual reality. [0003] Currently used flexible angle sensors generally sense angle changes by detecting changes in resistance or capacitance. Its basic structure is to embed microelectrodes or nanoelectrical fu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/353
CPCG01D5/3538
Inventor 张磊童利民
Owner ZHEJIANG UNIV
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