One-open and one-standby vacuum pump set
A technology of vacuum pumps and vacuum chambers, which is applied in the direction of pumps, pump devices, mechanical equipment, etc., and can solve the problem that the continuous working time of the vacuum pump system cannot be satisfied.
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[0007] see figure 1 , a vacuum pump group with one opening and one preparation, which includes a vacuum chamber 1, a vacuum pump group one 2, a vacuum valve one 3, a vacuum pump group two 4, and a vacuum valve two 5, the vacuum pump group one 2 is connected with the vacuum valve one 3, and the vacuum pump Group 2 4 is connected with vacuum valve 2 5, and vacuum valve 1 3 is connected with vacuum chamber 1 after being connected in parallel with vacuum valve 2 5.
[0008] After the equipment is started, the vacuum pump group 1 and the vacuum valve 1 work first to pump the vacuum. During continuous operation, when any part of the vacuum pump group 1 fails due to long-term operation, the equipment will automatically give a fault message, and then close the vacuum pump group. When a switching signal is given at the same time, the equipment automatically switches to the standby vacuum pump group 2, thus ensuring the normal operation of the equipment, and then the vacuum pump group 1...
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